Skip to main content Accessibility help
×
Home

Domain and Interface Structures of Epitaxial PtSi

  • H. Kawarada (a1), I. Ohdomari (a1) and S. Horiuchi (a2)

Abstract

The crystalline perfection of epitaxial PtSi thin films and the microstructure of the PtSi/Si interface have been examined using transmission electron microscopy (TEM), including lattice image techniques. Epitaxial PtSi layers grow with domains which have three different positions on a (111) Si substrate. Inside a domain the crystalline perfection is high, and at the domain boundary no intermediate region has been observed. The undulation of the PtSi/Si interface is larger than that of other epitaxial silicide/Si interfaces. Despite the large undulation, a cross-sectional lattice image shows the epitaxial layer extends to the interface. The interface is abrupt in the epitaxial PtSi/Si system.

Copyright

References

Hide All
1. Andrews, J.M. and Phillips, J.C., Phys. REv. Lett., 35, 56 (1975).
2. Sinha, A.K., Marcus, R.B., Sheng, T.T., and Haszka, S.E., J. Appl. Phys., 43, 3637 (1972).
3. Ishiwara, H., Hikosaka, K., and Furukawa, S., J. Appl. Phys., 50, 5302 (1979).
4. Ghozlene, H.B., Beaufrere, P., and Authier, A., J. Appl. Phys., 49, 3998 (1978).
5. Foll, H., Ho, P.S., and Tu, K.N., Phil. Mag. A., 45, 31 (1982).
6. Ohdomari, I. and Kawarada, H., U.S.-Japan Seminar on “Solid Phase Epitaxy and Interface Kinetics”, June 20–24, 1983, Oiso.
7. Wyckoff, R.W.G., Crystal Structures (Interscinece, New York, 1963), vol. 1.
8. Tsaur, B.-Y., Silversmith, D.J., Mountain, R.W., and Anderson, C.H. Jr., Thin Solid Film, 93, 331 (1982).
9. Foll, H., Ho, P.S., and Tu, K.N., J. Appl. Phys., 52, 250 (1981).
10. Gibson, J.M., Bean, J.C., Poate, J.M., and Tung, R.T., Appl. Phys. Lett., 41, 818 (1982).
11. Cherns, D., Smith, D.A., Krakow, W., and Batson, P.E., Phil. Mag. A, 45, 107, (1982).

Domain and Interface Structures of Epitaxial PtSi

  • H. Kawarada (a1), I. Ohdomari (a1) and S. Horiuchi (a2)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed