Hostname: page-component-8448b6f56d-cfpbc Total loading time: 0 Render date: 2024-04-24T19:29:46.347Z Has data issue: false hasContentIssue false
  • English
  • Français

Direct laser fabrication of nanostructures on Si(001)

Published online by Cambridge University Press:  06 February 2015

Anahita Haghizadeh  and
Haeyeon Yang
Anahita Haghizadeh
Affiliation:
Department of Nanoscience and Nanoengineering, South Dakota School of Mines and Technology, Rapid City, SD 57701, U.S.A.
Haeyeon Yang*
Affiliation:
Department of Nanoscience and Nanoengineering, South Dakota School of Mines and Technology, Rapid City, SD 57701, U.S.A.
*
*Email: haeyeon.yang@sdsmt.edu
Get access

Abstract

We study how the period of transient thermal gradient impacts on morphologies of nanostructures on the Si(001) surface. Strain-free, self-assembled nanodots as well as periodic nanowires are fabricated directly on Si(001) surfaces by applying high power laser pulses on the surface interferentially. The morphologies of the nanostructures are studied by atomic force microscopy. Generally, the laser irradiated surfaces show nanowires but nanodots are also observed. The nanowire width increases with interference period. The narrowest nanowires observed have the width smaller than 50 nm, which is four times smaller than the interference period while the nanodots have a base width of 43 nm and height of 8 nm.

Keywords

nanostructureSirapid solidification
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1748: Symposium II – Semiconductor Nanocrystals, Plasmonic Metal Nanoparticles, and Metal-Hybrid Structures , 2015 , mrsf14-1748-ii11-07
Copyright
Copyright © Materials Research Society 2015 

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

Zhang, C., Kalyanaraman, R., In-situ nanostructured film formation during physical vapor deposition, Applied Physics Letters, 83 (2003) 4827–4829.CrossRefGoogle Scholar
Zhai, T., Zhang, X., Pang, Z., Dou, F., Direct Writing of Polymer Lasers Using Interference Ablation, Advanced Materials, 23 (2011) 1860–1864.CrossRefGoogle ScholarPubMed
Favazza, C., Trice, J., Kalyanaraman, R., Sureshkumar, R., Self-organized metal nanostructures through laser-interference driven thermocapillary convection, Applied Physics Letters, 91 (2007) 043105–043103.CrossRefGoogle Scholar
Favazza, C., Trice, J., Krishna, H., Kalyanaraman, R., Laser-induced patterning of Co nanostructures under ambient conditions, in: Materials Research Society, MRS, Boston, 2005, pp. Y04–06.Google Scholar
Kelly, M.K., Ambacher, O., Dahlheimer, B., Groos, G., Dimitrov, R., Angerer, H., Stutzmann, M., Optical patterning of GaN films, Applied Physics Letters, 69 (1996) 1749–1751.CrossRefGoogle Scholar
Clegg, C.M., Yang, H., Guided assembly of quantum dots through selective laser heating, Solar Energy Materials and Solar Cells, 108 (2013) 252–255.CrossRefGoogle Scholar
Long, J.P., Goldenberg, S.S., Kabler, M.N., Pulsed laser-induced photochemical decomposition of GaAs(110) studied with time-resolved photoelectron spectroscopy using synchrotron radiation, Physical Review Letters, 68 (1992) 1014.CrossRefGoogle ScholarPubMed
Yang, H., Direct laser patterning of GaAs(001) surfaces, MRS Online Proceedings Library, 1628 (2014).Google Scholar
Rezek, B., Nebel, C.E., Stutzmann, M., Laser beam induced currents in polycrystalline silicon thin films prepared by interference laser crystallization, Journal of Applied Physics, 91 (2002) 4220–4228.CrossRefGoogle Scholar
Shank, C.V., Schmidt, R.V., Optical technique for producing 0.1-mu periodic surface structures, Applied Physics Letters, 23 (1973) 154–155.CrossRefGoogle Scholar
Savas, T.A., Farhoud, M., Smith, H.I., Hwang, M., Ross, C.A., Properties of large-area nanomagnet arrays with 100 nm period made by interferometric lithography, Journal of Applied Physics, 85 (1999) 6160–6162.CrossRefGoogle Scholar
Li, L., Hong, M., Schmidt, M., Zhong, M., Malshe, A., Huis, B. in’tVeld, Kovalenko, V., Laser nano-manufacturing – State of the art and challenges, CIRP Annals - Manufacturing Technology, 60 (2011) 735–755.CrossRefGoogle Scholar
Zhao, W., Verhoef, R.W., Asscher, M., Diffusion of potassium on Re(001) investigated by coverage grating-optical second-harmonic diffraction, J. Chem. Phys., 107 (1997) 5554–5560.CrossRefGoogle Scholar
Kelly, M.K., Ambacher, O., Dahlheimer, B., Groos, G., Dimitrov, R., Angerer, H., Stutzmann, M., Optical patterning of GaN films, Appl. Phys. Lett., 69 (1996) 1749.CrossRefGoogle Scholar
Khotkevych, V.V., Bending, S.J., A milliKelvin scanning Hall probe microscope for high resolution magnetic imaging, Journal of Physics: Conference Series, 150 (2009) 012021.CrossRefGoogle Scholar