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Diffraction Microscopy using 20-kV Electron Beam for Multi-Wall Carbon Nanotubes

Published online by Cambridge University Press:  01 February 2011

Osamu Kamimura ,
Kota Kawahara ,
Takahisa Doi ,
Takashi Dobashi ,
Takashi Abe  and
Kazutoshi Gohara
Osamu Kamimura
Affiliation:
osamu.kamimura.ae@hitachi.com, Central Research Laboratory, Hitachi, Ltd., Advanced Technology Research Dept., 1-280, Higashi-koigakubo, Kokubunji-shi, Tokyo, N/A, Japan
Kota Kawahara
Affiliation:
kawahara@eng.hokudai.ac.jp, Hokkaido University, Department of Applied Physics, Sapporo, N/A, Japan
Takahisa Doi
Affiliation:
takahisa.doi.px@hitachi.com, Central Research Laboratory, Hitachi, Ltd., 1-280, Higashi-koigakubo, Kokubunji-shi, Tokyo, N/A, Japan
Takashi Dobashi
Affiliation:
takashi.dobashi.kn@hitachi.com, Central Research Laboratory, Hitachi, Ltd., 1-280, Higashi-koigakubo, Kokubunji-shi, Tokyo, N/A, Japan
Takashi Abe
Affiliation:
t-abe@eng.hokudai.ac.jp, Hokkaido University, Department of Applied Physics, Sapporo, N/A, Japan
Kazutoshi Gohara
Affiliation:
gohara@eng.hokudai.ac.jp, Hokkaido University, Department of Applied Physics, Sapporo, N/A, Japan
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Abstract

Diffraction microscopy (or diffractive imaging) with iterative phase retrieval was performed using a low-energy (20-keV) electron beam to verify the possibility of high-resolution imaging with low specimen damage. Diffraction patterns of fine and uniform multi-wall carbon nanotubes (MWCNT) were recorded without a post-specimen lens. One- and two-dimensional phase retrievals were processed from the diffraction pattern alone. The reconstructed object images reflected the characteristic structure of the MWCNT. These results show the possibility of high-resolution imaging with a low-energy electron beam.

Keywords

transmission electron microscopy (TEM)scanning transmission electron microscopy (STEM)scanning electron microscopy (SEM)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1026: Symposium C – Quantitative Electron Microscopy for Materials Science , 2007 , 1026-C07-06
Copyright
Copyright © Materials Research Society 2008

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