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Dielectric Permittivity Mapping up to 9GHz Region with Non-contact Microwave Probe for Ferroelectric Device

  • Hirofumi Kakemoto (a1), Jianyong Li (a2), Takakiyo Harigai (a3), Song-Min Nam (a4), Satoshi Wada (a5) and Takaaki Tsurumi (a6)...

Abstract

Direct observations for high frequency microscopic dielectric distributions in cross sections of a multi-layer ceramic capacitor were carried out using non-contact type microwave probe. The measured data were imaged from the raw data and rounding data process. Using microwave reflection intensity mappings from cross sections of multi-layer ceramic capacitor, the dielectric permittivity distribution in micro-region of a multi-layer ceramic capacitor was measured at room temperature. The spatial resolution was experimentally estimated to be about 10 μm from mappings of the dielectric and inner electrode layers in a multi-layer ceramic capacitor.

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