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Dielectric and Ferroelectric Characterization of Sol-Gel Derived Ca-Doped PbTiO3 Thin Films

  • G. Teowee (a1), K.C. McCarthy (a1), E.K. Franke (a1), J.M. Boulton (a1), T.P. Alexander (a2), T.J. Bukowski (a2) and D.R. Uhlmann (a2)...

Abstract

A series of sol-gel derived CaTiO3- PbTiO3 thin films ( i.e. Pb1−xCaxTiO3 with x = 0 − 1) was prepared on platinized Si substrates and fired to temperatures ranging from 550C to 650C. Multiple spincoating was performed to obtain films up to 0.5 μm thick with an intermediate firing of 400C between coatings. After the final crystallization firing, top Pt electrodes were sputtered to form monolithic capacitors. These capacitors were subjected to dielectric and ferroelectric characterization using an impedance analyzer and Radiant Technology RT66A Ferroelectric Test System. XRD was used to study the phase development and phase assembly of the fired films. All compositions were single perovskite phase after firing to 600C. The effects of Ca content on the crystallization behavior and ferroelectric properties are discussed.

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1. Ferroelectric Films IV, MRS Symp. Proc., 361, (1995).
2. King, G. and Goo, E.K., J.Amer. Ceram. Soc., 73, 1534(1990).
3. Sawaguchi, E., Mitsuma, T. and Ishii, Z., J. Phys. Soc. Jpn., 11, 1298(1956).
4. Fujii, T., Fujishima, A., Hirano, T. and Kobayashi, T., Appl. Phys. Lett., 62, 3204(1993).
5. Deitch, R.H., West, E.J., Giallorezi, T.G. and Weller, T.F., Appl. Opt., 13, 712(1974).
6. Tsuzuki, A., Murakami, H., Kani, K., Watari, W. and Tori, Y., J.mater. Sci. Letts., 10, 125 (1991).
7. Sirera, R., Calzada, M.L., Carmona, F. and Jimenez, B., J.Mater. Sci., Letts., 13, 1804(1994).
8. Yamaka, E., Kimura, H., Kanaya, H. and Ohkuma, H., J.Vac. Sci. Tech., A6, 2921(1988).
9. Yamamoto, T., Saho, M., Okazaki, K. and Goo, E., Jpn. J. Appl. Phys., 26(Suppl. 2), 57(1987).
10. Pecherskii, V.P. and Tairova, D.A., Izv. Leningrad. Elektrotekh. Inst, 87, 42(1969).
11. Teowee, G., Boulton, J.M. and Uhlmann, D.R., MRS Symp. Proc., 271, 345(1992).
12. Teowee, G., Boulton, J.M., Wade, R.K. and Uhlmann, D.R., Integ. Ferroelectrics, 4, 231(1994).
13. Sawaguchi, E. and Charters, M.L., J. Amer. Cer. Soc., 42, 157(1959).
14. Shirane, G., Sawaguchi, E. and Takagi, Y., Phy. Rev., 84, 476(1955)
15. Merz, W.J., Phy. Rev., 91, 513(1953).

Dielectric and Ferroelectric Characterization of Sol-Gel Derived Ca-Doped PbTiO3 Thin Films

  • G. Teowee (a1), K.C. McCarthy (a1), E.K. Franke (a1), J.M. Boulton (a1), T.P. Alexander (a2), T.J. Bukowski (a2) and D.R. Uhlmann (a2)...

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