Skip to main content Accessibility help
×
Home

Diamond-Like Carbon Deposition for Tribological Applications at Los Alamos National Laboratory

  • K. C. Walter (a1), M. Nastasi (a1), H. Kung (a1), P. Kodali (a1), C. Munson (a1), I. Henins (a1) and B. P. Wood (a1)...

Abstract

Diamond-like carbon (DLC) films have been deposited on silicon using two deposition techniques. Both deposition techniques used acetylene (C2H2) plasmas as the carbon/hydrogen source. One technique, that is relatively well known, employs an rf-plasma with an associated self-bias on the substrate. DLC films have also been deposited using a pulsed-bias method. Coatings of various thickness have been deposited using both deposition methods, and various combinations of gas pressure and bias. Coating characteristics, such as composition, density, and sp3 content, of selected films will be presented. For each deposition technique, the correlation between coating characteristics, mechanical properties and tribological behavior is presented.

Copyright

References

Hide All
1. Robertson, J., Prog. Solid St. Chem. 21, 199 (1991).
2. Hirvonen, J.-P., Lappalainen, R., Koskinen, J., Antilla, A., Jervis, T.R., Trkula, M., J. Mater. Res. 5, 2524 (1990).
3. Enke, K., Dimigen, H., Hiibsch, H., Appl. Phys. Lett. 36, 291 (1980).
4. Wei, R., Wilbur, P.J., Erdemir, A., Kustas, F.M., Surf. Coat. Technol. 51, 139 (1992).
5. Oguri, K., Arai, T., J. Mater. Res. 7, 1313 (1992), R.L.C. Wu, Surf. Coat. Technol. 57, 258 (1992).
6. Itoh, Y., Hibi, S., Hioki, T., Kawamoto, J., J. Mater. Res. 6, 871 (1991).
7. André, B., Nabot, J.-Ph., Lombard, L., Martin, P., NATO ASI Series E, 266, 313 (1991).
8. Grill, A., Patel, V., Meyerson, B.S., NATO ASI Series E, 266, 417 (1991).
9. Antilla, A., in Structure-Property Relationships in Surface-Modified Ceramics edited by McHargue, C.J., Kossowsky, R., Hofer, W.O., (Kluwer Academic Publishers, 1989), p. 455.
10. Robertson, J., NATO ASI Series B, 266, 331 (1991).
11. Angus, J.C., Koidl, P., Domitz, S., in Plasma Deposited Thin Films, edited by Mort, J., Jansen, F., (CRC Press, Boca Raton, Florida, 1986), p. 89.
12. Gies, M.W. and Tamor, M.A., in Encyclopedia of Applied Physics, Vol.5, edited by Trigg, G.L., (VCH Publishers, Inc., New York, 1991), p. 1.
13. Catherine, Y., NATO ASI Series B, 266, 193 (1991).
14. Vandentop, G.J., Kawasaki, M., Nix, R.M., Brown, I.G., Salmeron, M., Somorjai, G.A., Phys. Rev. B41, 3200 (1990).
15. Chen, J., Conrad, J.R., Dodd, R.A., J. Mat. Engin. Perform. 2, 839 (1993).
16. Walter, K.C., Kung, H., Levine, T., Tesmer, J.R., Kodali, P., Wood, B.P., Rej, D.J., Nastasi, M., Koskinen, J., Hirvonen, J.-P., Mat. Res. Soc. Symp. Proc., Fall 1994 MRS Meeting Symposium A, in press, 1994.
17. Handbook of Modern Ion Beam Materials Analysis, edited by Tesmer, J.R. and Nastasi, M., (Materials Research Society, 1995.
18. Doolittle, L.R., Nucl. Instr. Meth. B9, 334 (1985).
19. Nano Instruments, Inc., Knoxville, TN.
20. Holmberg, K., Matthews, A., Coatings Tribology: Properties. Techniques and Applications in Surface Engineering, edited by Dowson, D., (Elsevier, Amsterdam, 1994), p. 53.
21. Müller, W., NATO ASI Series B: Physics 266(1991)229241.
22. Ronkainen, H., Likonen, J., Koskinen, J., Surf. Coating Technol. 54/55(1992)570577.
23. Monaghan, D.P., Teer, D.G., Logan, P.A., Efeoglu, I., Arnell, R.D., Surf. Coatings Technol. 60(1993)525530.
24. Coll, B.F., Sathrum, P., Aharonov, R., Peyre, J.P., Benmalek, M., presented at 19th Internataional Conference on Metallurgical Coatings and Thin Films (ICMCTF 92), San Diego, CA, USA, October 6–10, 1992.
25. Wei, R., Wilbur, P.J., Erdemir, A., Kustas, F.M., Surf. Coatings Technol. 51(1992)139145.
26. He, X., Li, W., Li, H., Vacuum 45(1994)977980.

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed