Hostname: page-component-84b7d79bbc-7nlkj Total loading time: 0 Render date: 2024-07-30T23:54:05.198Z Has data issue: false hasContentIssue false
  • English
  • Français

Diamond-Like Carbon Deposition for Tribological Applications at Los Alamos National Laboratory

Published online by Cambridge University Press:  15 February 2011

K. C. Walter ,
M. Nastasi ,
H. Kung ,
P. Kodali ,
C. Munson ,
I. Henins  and
B. P. Wood
K. C. Walter
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
M. Nastasi
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
H. Kung
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
P. Kodali
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
C. Munson
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
I. Henins
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
B. P. Wood
Affiliation:
Los Alamos National Laboratory, MS-K762, Los Alamos, NM, 87545
Get access

Abstract

Diamond-like carbon (DLC) films have been deposited on silicon using two deposition techniques. Both deposition techniques used acetylene (C2H2) plasmas as the carbon/hydrogen source. One technique, that is relatively well known, employs an rf-plasma with an associated self-bias on the substrate. DLC films have also been deposited using a pulsed-bias method. Coatings of various thickness have been deposited using both deposition methods, and various combinations of gas pressure and bias. Coating characteristics, such as composition, density, and sp3 content, of selected films will be presented. For each deposition technique, the correlation between coating characteristics, mechanical properties and tribological behavior is presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 411
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Robertson, J., Prog. Solid St. Chem. 21, 199 (1991).Google Scholar
2. Hirvonen, J.-P., Lappalainen, R., Koskinen, J., Antilla, A., Jervis, T.R., Trkula, M., J. Mater. Res. 5, 2524 (1990).Google Scholar
3. Enke, K., Dimigen, H., Hiibsch, H., Appl. Phys. Lett. 36, 291 (1980).Google Scholar
4. Wei, R., Wilbur, P.J., Erdemir, A., Kustas, F.M., Surf. Coat. Technol. 51, 139 (1992).Google Scholar
5. Oguri, K., Arai, T., J. Mater. Res. 7, 1313 (1992), R.L.C. Wu, Surf. Coat. Technol. 57, 258 (1992).Google Scholar
6. Itoh, Y., Hibi, S., Hioki, T., Kawamoto, J., J. Mater. Res. 6, 871 (1991).Google Scholar
7. André, B., Nabot, J.-Ph., Lombard, L., Martin, P., NATO ASI Series E, 266, 313 (1991).Google Scholar
8. Grill, A., Patel, V., Meyerson, B.S., NATO ASI Series E, 266, 417 (1991).Google Scholar
9. Antilla, A., in Structure-Property Relationships in Surface-Modified Ceramics edited by McHargue, C.J., Kossowsky, R., Hofer, W.O., (Kluwer Academic Publishers, 1989), p. 455.Google Scholar
10. Robertson, J., NATO ASI Series B, 266, 331 (1991).Google Scholar
11. Angus, J.C., Koidl, P., Domitz, S., in Plasma Deposited Thin Films, edited by Mort, J., Jansen, F., (CRC Press, Boca Raton, Florida, 1986), p. 89.Google Scholar
12. Gies, M.W. and Tamor, M.A., in Encyclopedia of Applied Physics, Vol.5, edited by Trigg, G.L., (VCH Publishers, Inc., New York, 1991), p. 1.Google Scholar
13. Catherine, Y., NATO ASI Series B, 266, 193 (1991).Google Scholar
14. Vandentop, G.J., Kawasaki, M., Nix, R.M., Brown, I.G., Salmeron, M., Somorjai, G.A., Phys. Rev. B41, 3200 (1990).Google Scholar
15. Chen, J., Conrad, J.R., Dodd, R.A., J. Mat. Engin. Perform. 2, 839 (1993).Google Scholar
16. Walter, K.C., Kung, H., Levine, T., Tesmer, J.R., Kodali, P., Wood, B.P., Rej, D.J., Nastasi, M., Koskinen, J., Hirvonen, J.-P., Mat. Res. Soc. Symp. Proc., Fall 1994 MRS Meeting Symposium A, in press, 1994.Google Scholar
17. Handbook of Modern Ion Beam Materials Analysis, edited by Tesmer, J.R. and Nastasi, M., (Materials Research Society, 1995.Google Scholar
18. Doolittle, L.R., Nucl. Instr. Meth. B9, 334 (1985).Google Scholar
19. Nano Instruments, Inc., Knoxville, TN.Google Scholar
20. Holmberg, K., Matthews, A., Coatings Tribology: Properties. Techniques and Applications in Surface Engineering, edited by Dowson, D., (Elsevier, Amsterdam, 1994), p. 53.Google Scholar
21. Müller, W., NATO ASI Series B: Physics 266(1991)229–241.Google Scholar
22. Ronkainen, H., Likonen, J., Koskinen, J., Surf. Coating Technol. 54/55(1992)570–577.Google Scholar
23. Monaghan, D.P., Teer, D.G., Logan, P.A., Efeoglu, I., Arnell, R.D., Surf. Coatings Technol. 60(1993)525–530.Google Scholar
24. Coll, B.F., Sathrum, P., Aharonov, R., Peyre, J.P., Benmalek, M., presented at 19th Internataional Conference on Metallurgical Coatings and Thin Films (ICMCTF 92), San Diego, CA, USA, October 6–10, 1992.Google Scholar
25. Wei, R., Wilbur, P.J., Erdemir, A., Kustas, F.M., Surf. Coatings Technol. 51(1992)139–145.Google Scholar
26. He, X., Li, W., Li, H., Vacuum 45(1994)977–980.Google Scholar