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Diamond and Polycrystalline Diamond for MEMS Applications: Simulations and Experiments

Published online by Cambridge University Press:  10 February 2011

Tahir Çağin ,
Jianwei Che ,
Michael N. Gardos  and
William A. Goddard III
Tahir Çağin
Affiliation:
Materials and Process Simulation Center, 139-74 California Institute of Technology, Pasadena, CA 91125, U.S.A.
Jianwei Che
Affiliation:
Materials and Process Simulation Center, 139-74 California Institute of Technology, Pasadena, CA 91125, U.S.A.
Michael N. Gardos
Affiliation:
Raytheon Communication Systems, El Segundo, CA 90025, U.S.A.
William A. Goddard III
Affiliation:
Materials and Process Simulation Center, 139-74 California Institute of Technology, Pasadena, CA 91125, U.S.A.
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Abstract

To date most of the MEMS devices are been based on Silicon. This is due to the technological know-how accumulated on manipulating, machining, manufacturing of Silicon. However, only very few devices involve moving parts. This is because of the rapid wear arising from high friction in these Silicon based systems. Recent tribometric experiments carried out by Gardos on Silicon and polycrystalline diamond show that this rapid wear is caused by a variety of factors, related both to surface chemistry and cohesive energy density of these likely MEMS bearing materials. Therefore, theoretical and tribological characterization of Si and PCD surfaces is essential prior to device fabrication to assure reliable MEMS operation unded various atmospheric environments, especially at elevated temperatures.

In this paper, we summarize tribological experiments and theoretical studies of friction and wear processes on diamond surfaces. We studied the atomic friction of diamond (100)-surface employing an extended bond-order-dependent potential for hydrocarbon systems in MD simulations.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 546: Symposium AA – Materials Science of Microelectromechanical Systems (MEMS)… , 1998 , 109
Copyright
Copyright © Materials Research Society 1999

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