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Diagnostic Techniques For Polycrystalline Thin Film Growth

  • Kuan-Lun Cheng (a1), Huang-Chung Cheng (a1) and Tri-Rung Yew (a2)

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1. Unagami, Takashi and Takeshita, Tatsuya, IEEE Trans. Electron Devices 36, 529 (1989).
2. Davis, R. F., Kelner, G., Shur, M., Palmour, J. W. and Edmond, J. A., Proc. IEEE 79, 677 (1991).
3. Wang, K. C., Cheng, K. L., Jian, Y. L., Yew, T. R. and Hwang, H. L., Jpn. J. Appl. Phys. 34, 927 (1995).
4. Cheng, K. L., Cheng, H. C., Liu, C. C., Lee, C. and Yew, T. R., Jpn. J. Appl. Phys. 34, 5527 (1995).
5. Liu, C. C., Lee, C., Cheng, K. L. and Cheng, H. C. and Yew, T. R., Appl. Phys. Lett. 66, 168 (1995).

Diagnostic Techniques For Polycrystalline Thin Film Growth

  • Kuan-Lun Cheng (a1), Huang-Chung Cheng (a1) and Tri-Rung Yew (a2)

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