Skip to main content Accessibility help

Development of Vertically Integrated Imaging and Particle Sensors

  • N. Wyrsch (a1), C. Miazza (a1), S. Dunand (a1), A. Shah (a1), N. Blanc (a2), R. Kaufmann (a2), L. Cavalier (a2), G. Anelli (a3), M. Despeisse (a3), P. Jarron (a3), D. Moraes (a3), A. G. Sirvent (a3), G. Dissertori (a4) and G. Viertel (a4)...


Integrated imaging and particle sensors have been developed using thin-film on ASIC technology. For this purpose, hydrogenated amorphous silicon diodes, in various configurations, have been optimized for imaging and direct particle detection. These devices were first deposited on glass substrates and later on CMOS readout chips. With an optimization of the material properties and of the diode, a dark current of 1 pA/cm2 could be achieved on p-i-n structures at reverse bias voltage of 1 V. CMOS imagers, incorporating these optimized diodes were then fabricated and characterized. Very thick diodes (with thicknesses up to 50 μm) were also optimized and deposited on glass and on CMOS readout chips. Particle detectors in TFA technology with 12 and 30 μm a-Si:H n-i-p diodes have been fabricated and characterized using light pulse illumination. Direct detection of single low-energy beta particles has been demonstrated.



Hide All
[1] Lulé, T., Benthien, S., Keller, H., Mütze, F., Rieve, P., Seibel, K., Sommer, M., Böhm, M., IEEE Trans. on Electron Devices 47, 2110 (2000).
[2] Schneider, B., Rieve, P., Böhm, M., in Handbook on Computer Vision an Applications, ed. Jähne, B., Haußecker, H., Geißler, P., (Academic Press, Boston, 1999)pp. 237270.
[3] Theil, J. A., Snyder, R., Hula, D., Lindahl, K., Haddad, H., Roland, J., J. of Non-Cryst. Sol. 299-302, 1234 (2002).
[4] Street, R.A., “Large Area Image Sensor Arrays” in Technology and Application of Amorphous Silicon, ed. Street, R.A., Springer Series in Materials Sciences 37 (Springer-Verlag, Berlin, 2000), p.147.
[5] Guha, S., Yang, J., Banerjee, A., Glatfelter, T., Proc. of the 2nd World Conf. and Exhibition on PV Solar Energy Conversion, Vienna, Austria, 3609 (1998).
[6] Kuendig, J., Goetz, M., Meier, J., Torres, P., Feitknecht, L., Pernet, P., Niquille, X., Shah, A., Gerlach, L., Fernandez, E., Proc. of the 16th EU PV Solar Energy Conf., Glasgow, UK, May, 986 (2000).
[7] Antonuk, L.E., Boudry, J., Yorkston, J., Wild, C. F, Longo, M.J., Street, R.A., Nucl. Instr. And Meth. A299, 143 (1990)
[8] Chabloz, P., Keppner, H., Beartschi, V., Shah, A., Chatellard, D., Egger, J.-P., Denoréaz, M., Jeannet, E., Germond, J.-F., Vuilleumier, R., MRS Proc. 258, 1057 (1992).
[9] Hong, W. S, Petrova-Koch, V., Drewery, J., Jing, T., Lee, H., Perez-Mendez, V., MRS. Res. Symp. Proc. 377, 773 (1995).
[10] Chabloz, P., Keppner, H., Fischer, D., Link, D., Shah, A., J. Non-Cryst. Sol., 198-200, 1159 (1996).
[11] Shah, A., Dutta, J., Wyrsch, N., Prasad, K., Curtins, H., Finger, F., Howling, A., Hollenstein, Ch., MRS Proc. 258, 15 (1992).
[12] Morrison, S., Servati, P., Vygranenko, Y., Nathan, A., and Madan, A., MRS. Res. Symp. Proc. 715, 701 (2002).


Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed