Skip to main content Accessibility help
×
Home

Determination of the Mechanical Properties of Polysilicon Thin Films Using Bulge Testing

  • S. Jayaraman (a1), R. L. Edwards (a2) and K. J. Hemker (a1)

Abstract

Using standard deposition and micromachining techniques, silicon substrates with square and rectangular windows covered with membranes of polycrystalline silicon (polysilicon) have been fabricated. Pressure-displacement curves obtained during the bulge testing of membranes with the above geometries have been used to determine the elastic constants E and v of the polysilicon. The results obtained (E = 162± 4 GPa and v = 0.19±0.03) are in good agreement with literature values for bulk polycrystalline silicon.

Copyright

References

Hide All
1. Hammond, M.L., MRS Symp. Proc., 182, 3, (1990).
2. Beams, J.W., Structure and Properties of Thin Films (eds Nergebauer, C.A., Newkirk, J.B. and Vermilyea, D.A.), John Wiley and sons Inc., 183, (1959).
3. Levy, S., Proc. Symp. Appl. Math., 1, 197, (1947).
4. Timoshenko, S.P. and Woinowsky – Krieger, S., Theory of Plates and Shells, McGraw-Hill Inc., (1987).
5. Tabata, O., Kawahata, K., Sugiyama, S. and Igarashi, I., Sensors and Actuators A, 20, 135, (1989).
6. Vlassak, J.J., Ph.D. thesis, Stanford University, (1994).
7. Lin, P.H., Ph.D. thesis, Massachussets Institute of Technology, (1990).
8. Sharpe, W.N., Yuan, B., Vaidyanathan, R. and Edwards, R.L., Proc. 10th Int. Workshop on MEMS, 529, (1997).
9. Sharpe, W.N., Yuan, B., Vaidyanathan, R. and Edwards, R.L., SPIE, 2880, 78, (1996).
10. Jayaraman, S., Hemker, K.J. and Edwards, R.L., to be submitted to Journal of Materials Research.
11. Tsuchiya, T., Tabata, O., Sakata, J. and Taga, Y., Proc. 10th Int. Workshop on MEMS, 529, (1997).
12. Koshinken, J., Steinwall, E., Soave, R. and Johnson, H.H., J. Micromech. and Microengg., 3, 13, (1993).
13. Maier-Schneider, D. et al., J. Micromech. and Microengg., 5, 121, (1995).
14. Michalicek, M.A., Sene, D.E. and Bright, V.M., Proc. Int. Conf. on Integrated Micro/Nanotechnology for space application, NASA and Aerospace Corp. 214, (1995).
15. Biebl, M., Brandl, G. and Howe, R.T., Proc. 8th Int. Conf. on Solid State Actuators and Eurosensors, IX, 80, (1995).
16. Biebl, M. et al., Sensors and Actuators A, 46, 593, [1995].

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed