Skip to main content Accessibility help
×
Home

The Determination of Mechanical Parameters and Residual Stresses for Thin Films Using Micro-Cantilever Beams

  • S. Hong (a1), T. P. Weihs (a1), J. C. Bravman (a1) and W. D. Nix (a1)

Abstract

A method for determining mechanical parameters and residual stresses for thin films is described. Multi-layer cantilever beams (LPCVD SiNx/thermal SiO2) are fabricated utilizing standard IC processing technologies and micromachining of silicon. The elastic response of the beams to imposed deflections is then measured using a Nanoindenter, a sub-micron hardness testing machine. The elastic constants of the nitride films are calculated from the force vs. deflection slope and known elastic constants of the thermal SiO2 and silicon. By measuring the curvature of the multi-layer cantilever beams with a scanning electron microscope after successive etching of the LPCVD nitride films, average and differential stresses in the films were calculated.

Copyright

References

Hide All
[1] Bohg, A. and Gained, A. K., Appl. Phys. Lett. 33, pp 895897, Nov., 1978.
[2] Weihs, T. P., Hong, S., Bravman, J. C. and Nix, W. D., J. Mater. Res. 3, pp 931942, Sep/Oct., 1988.
[3] Weihs, T. P., Hong, S., Bravman, J. C. and Nix, W. D., These Proceedings.
[4] Townsend, P. H., Barnett, D.M. and Brunner, T. A., J. Appl. Phys. 62, pp. 44384444, Nov., 1987.
[5] Brantley, W. A., J. Appl. Phys. 44, pp 534535, Jan., 1973.
[6] CRC Handbook of Chemistry and Physics, edited by Weast, R. C. (CRC, Boca Raton, FL, 1985), p.56
[7] Bean, K. E., Gleim, P. S., Yeakley, R. L. and Runyan, W. R., J. Electrochem. Soc., 114, pp. 733737, July, 1967.
[8] Pan, P. and Berry, W., J. Electrochem. Soc., 132, pp. 30013005, Dec.,1985.

The Determination of Mechanical Parameters and Residual Stresses for Thin Films Using Micro-Cantilever Beams

  • S. Hong (a1), T. P. Weihs (a1), J. C. Bravman (a1) and W. D. Nix (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed