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Determination and Critical Assessment of the Optical Properties of Common Substrate Materials Used in III-V Nitride Heterostructures with Vacuum Ultraviolet Spectroscopic Ellipsometry

Published online by Cambridge University Press:  21 March 2011

N.V. Edwards ,
O.P.A. Lindquist ,
L.D. Madsen ,
S. Zollner ,
K. Järrehdahl ,
C. Cobet ,
S. Peters ,
N. Esser ,
A. Konkar  and
D. E. Aspnes
N.V. Edwards
Affiliation:
Motorola Process and Materials Characterization Laboratory, Mesa AZ 85202;
O.P.A. Lindquist
Affiliation:
Department of Physics and Measurement Technology, Linköping University, SE-581 83 Linköping, Sweden;
L.D. Madsen
Affiliation:
Materials Science and Engineering, Carnegie Mellon University, Pittsburgh PA 15213;
S. Zollner
Affiliation:
Motorola Process and Materials Characterization Laboratory, Mesa AZ 85202;
K. Järrehdahl
Affiliation:
Department of Physics and Measurement Technology, Linköping University, SE-581 83 Linköping, Sweden;
C. Cobet
Affiliation:
Institut für Festkörperphysik, Sekr. PN6-1, Technische Universität Berlin, D-10623 Berlin, Germany;
S. Peters
Affiliation:
SENTECH Instruments GmbH, D-12489 Berlin, Germany;
N. Esser
Affiliation:
Institut für Festkörperphysik, Sekr. PN6-1, Technische Universität Berlin, D-10623 Berlin, Germany;
A. Konkar
Affiliation:
Motorola Process and Materials Characterization Laboratory, Mesa AZ 85202;
D. E. Aspnes
Affiliation:
Motorola Process and Materials Characterization Laboratory, Mesa AZ 85202; Department of Physics, NC State University, Raleigh, North Carolina 27695
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Abstract

As a first step toward enabling the in-line metrology of III-V nitride heterostructure and materials, we present the optical constants of the two common substrate materials over an unprecendented spectral range. Vacuum Ultraviolet spectroscopic ellipsometry (VUVSE) was used to obtain the optical constants for Al2O3 and the ordinary and extra-ordinary component of the dielectric function for both 4H- and 6H-SiC. The results are discussed in the context of anisotropy, polytypism, bandstructure, optical transitions, and preparation/characterization of abrupt surfaces, where appropriate.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 693 , 2001 , I8.3.1
Copyright
Copyright © Materials Research Society 2002

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References

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