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Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

  • Edward S. Kolesar (a1), Matthew D. Ruff (a1), William E. Odom (a1), Joseph A. Jayachandran (a1), Justin B. McAllister (a1), Simon Y. Ko (a1), Jeffery T. Howard (a1), Peter B. Allen (a1), Josh M. Wilken (a1), Noah C. Boydston (a1), Jorge E. Bosch (a1) and Richard J. Wilks (a1)...

Abstract

This research focuses on the design and experimental characterization of two types of MEMS asymmetrical electrothermal microactuators. Both microactuator design variants use resistive (Joule) heating to generate thermal expansion and movement. Deflection and force measurements of both microactuators as a function of applied electrical power are presented. Also described is the practical integration of the electrothermal microactuators in a monolithic microengine that is capable of rotating a set of gears.

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Design and Performance of a Microengine Realized with Arrays of Asymmetrical Electrothermal Polysilicon Surface Micromachined Microactuators

  • Edward S. Kolesar (a1), Matthew D. Ruff (a1), William E. Odom (a1), Joseph A. Jayachandran (a1), Justin B. McAllister (a1), Simon Y. Ko (a1), Jeffery T. Howard (a1), Peter B. Allen (a1), Josh M. Wilken (a1), Noah C. Boydston (a1), Jorge E. Bosch (a1) and Richard J. Wilks (a1)...

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