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Deposition of Tin by Electron Cyclotron Resonance - Metal Organic Molecular Beam Epitaxy

  • P. W. Wisk (a1), C. R. Abernathy (a1), S. J. Pearton (a1), F. Ren (a1), A. Katz (a1) and D. A. Bohling (a2)...


We have investigated the feasibility of depositing TiN from nitrogen plasmas by Electron Cyclotron Resonance – Metal Organic Molecular Beam Epitaxy (ECR-MOMBE). Growth rate, index of refraction and resistivity were evaluated as a function of growth temperature and group V flow. It was found that TiN could be deposited at reasonable growth rates on either GaAs or Si substrates. However, the resistivity of the materia is quite high, >1700 µΩ-cm, probably because of significant carbon uptake into the layers.



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