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Deposition of Thin Films of Silicon Carbide on Fused Quartz and on Sapphire by Laser Ablation of Ceramic Silicon Carbide Targets

  • L. Rimai (a1), R. Ager (a1), J. Hangas (a1), E. M. Loaothetis (a1), Nayef Abu-ageel (a2) and M. Aslam (a2)...

Abstract

Ablation of ceramic silicon carbide with 351 nm excimer radiation was used to depositSIC films on fused silica and on sapphire. For deposition temperatures above 850° C, diffraction shows the films to be crystalline with the [111] axis preferentially oriented normally to the film. Optical spectra show an indirect energy gap at 2.2 eV, near that for the cubic polytype, although the 200 diffractions are absent. Room temperature resistivities range between .02 to .1 Ωcm. Deposition below 600° C yields amorphous SiC with no diffraction bands, low and variable optical band gap and very high resistivity.

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Deposition of Thin Films of Silicon Carbide on Fused Quartz and on Sapphire by Laser Ablation of Ceramic Silicon Carbide Targets

  • L. Rimai (a1), R. Ager (a1), J. Hangas (a1), E. M. Loaothetis (a1), Nayef Abu-ageel (a2) and M. Aslam (a2)...

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