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Dependence on Collision Time of Particle Ejection of Atom-Bombarded Single-Crystal Surfaces

Published online by Cambridge University Press:  21 February 2011

Che-Chen Chang  and
Shi-Wei Wang
Che-Chen Chang
Affiliation:
Department of Chemistry, National Taiwan University, Taipei, Taiwan, R.O.C.
Shi-Wei Wang
Affiliation:
Department of Chemistry, National Taiwan University, Taipei, Taiwan, R.O.C.
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Abstract

Ejection properties of particles emitted from a keV-atom-bombarded Ag{100} surface are calculated using classical dynamics to model the energy dissipation process. The ejection behavior of the sputtered particles depends strongly on the time interval between the instant of the primary impact on the surface and the moment when the emitting surface atom passes the cutoff boundary of the interaction potential. Both the sputtered neutrals and ions have a similar collision-time distribution. Most particles eject from the surface within 350 fsec after the primary impact. The sputter intensity maximized at around 145 fsec. For particles leaving the surface after -100 fsec of the primary impact, the preferred azimuths of ejection are not sensitive to the collision time. The angular distribution of sputtered particles is less dependent of the collision time than of the ejection energy. The angular anisotropy is also significantly enhanced at high collision times. The results find applications in the characterization and imaging of material surfaces.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 396: Symposium A – Ion-Solid Interactions for Materials Modification and Processing , 1995 , 21
Copyright
Copyright © Materials Research Society 1996

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