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Demonstration of Improved Quantitative Mobility Spectrum Analysis (i-QMSA)

  • I. Vurgaftman (a1), J. R. Meyer (a1), C. A. Hoffman (a1), D. Redfern (a2), J. Antoszewski (a2), L. Faraone (a2) and J. R. Lindemuth (a3)...

Abstract

We discuss an improved quantitative mobility spectrum analysis (i-QMSA) of magnetic-field-dependent Hall and resistivity data, which can determine multiple electron and hole densities and mobilities. A fully automated computer implementation of i-QMSA is applied to a variety of synthetic and real data sets. The results show that the new algorithm increases the information available from a given data set and is suitable for use as a standard tool in the characterization of semiconductor materials and devices.

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[3] Meyer, J. R., Hoffman, C. A., Antoszewski, J., and Faraone, L., J. Appl. Phys. 81, 709 (1997).
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[7] Antoszewski, J., Seymour, D. J., Faraone, L., Meyer, J. R., and Hoffman, C. A., J. Electron. Mater. 24, 1255 (1995).

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