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Deformation Processes during Indentation of Mesoporous Silica Thin Films

Published online by Cambridge University Press:  01 February 2011

M. Klotz
Affiliation:
Unité Mixte CNRS/Saint-Gobain “Surface du Verre et Interface”, UMR 125, Saint-Gobain, Recherche, F-93303, Aubervilliers, Cedex, France. etienne.barthel@saint-gobain.com
A. Perriot
Affiliation:
Unité Mixte CNRS/Saint-Gobain “Surface du Verre et Interface”, UMR 125, Saint-Gobain, Recherche, F-93303, Aubervilliers, Cedex, France. etienne.barthel@saint-gobain.com
E. Barthel
Affiliation:
Unité Mixte CNRS/Saint-Gobain “Surface du Verre et Interface”, UMR 125, Saint-Gobain, Recherche, F-93303, Aubervilliers, Cedex, France. etienne.barthel@saint-gobain.com
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Abstract

Nanoindentation was used to probe the mechanical response of mesoporous silica films as a function of processing treatment. A contrasted behaviour appears between low temperature processed films which retain the templating agent and are thus little compressible, and high temperature processed films, which are more condensed and also exhibit high porosity. We suggest that the behaviour of the former is dominated by shear flow, at least above a given threshold, while the latter are characterized by a yield strength in compression as is commonly found in porous materials. The response to indentation allows fast qualitative comparison of mechanical responses: in the present work, we show that a fast UV-O3 treatment results in mechanical properties which are undistinguishable from a much more cumbersome high temperature heat treatment.

Type
Research Article
Copyright
Copyright © Materials Research Society 2004

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References

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