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DC Plasma Synthesis of Aluminum Nitride Ceramic Powders

Published online by Cambridge University Press:  28 February 2011

Z. P. Lu  and
E. Pfender
Z. P. Lu
Affiliation:
Department of Mechanical EngineeringUniversity of MinnesotaMinneapolis, Minnesota 55455, U.S.A.
E. Pfender
Affiliation:
Department of Mechanical EngineeringUniversity of MinnesotaMinneapolis, Minnesota 55455, U.S.A.
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Extract

A novel Triple DC Torch Plasma Reactor (TTPR) has been developed for the plasma synthesis of fine ceramic powders. The reactor consists of three identical plasma torches. The plasma jets from these torches form a converging plasma volume into which the starting powder is fed. Thermodynamic equilibrium calculations have been performed for predicting the behavior of an aluminum-nitrogen system. Aluminum nitride has been synthesized by using the TTPR operating in the non-transferred mode. Product characterizations indicate that single hexagonal phase AIN ceramic powder has been obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 180: Symposium A – Better Ceramics Through Chemistry IV , 1990 , 857
Copyright
Copyright © Materials Research Society 1990

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References

REFERENCES

[1] Slack, G. A., ‘Nonmetallic Crystals with High Thermal Conductivity’, J. Phys. Chem. Solids 34, 321 (1973).Google Scholar
[2] Werdecker, W. and Aldinger, F., “Aluminum Nitride—An Alternative Ceramic Substrate for High Power Applications in Microcircuits”, IEEE Trans. CHMT-7, 399 (1984).Google Scholar
[3] Fister, D. and Starck, H. C., ‘AIN and BN Powders for Advanced Applications’, Ceram. Eng. Sci. Process. 6, 1305 (1985).Google Scholar
[4] Lu, Z. P. and Pfender, E., “Synthesis of AIN Powder in a Triple Torch Plasma System”, in 9th Int. Symp. on Plasma Chem., Edited by d'Agostino, R., Pugnochiuso, Italy, Sept.4–8, 675 (1989).Google Scholar
[5] Besmann, T. M., ‘SOLGASMJX-PV, a Computer Program to Calculate Equilibrium Relationships in Complex Chemical Systems’, Oak Ridge National Laboratory, Oak Ridge, Report ORNL/TM-5775 April (1977).Google Scholar