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Crystallization Processes of Amorphous Si During Excimer Laser Annealing in Complete-melting and Near-complete-Melting Conditions: A Molecular Dynamics Study

  • Tomohiko Ogata (a1), Takanori Mitani (a2), Shinji Munetoh (a3) and Teruaki Motooka (a4)

Abstract

We investigated crystallization processes of amorphous Si (a-Si) during the excimer laser annealing in the complete-melting and near-complete-melting conditions by using molecular dynamics simulations. The initial a-Si configuration was prepared by quenching liquid Si (l-Si) in a MD cell with a size of 50×50×150Å3 composed of 18666 atoms. KrF excimer laser (wavelength: 248nm) annealing processes of a-Si were calculated by taking account of the change in the optical constant upon melting during a laser pulse shot with the intensity I o exp[−(t–t0)22] (I o : laser fluence, t: irradiation time). The refractive indices of a-Si and l-Si were set at n+ik=1.0+3.0i and n+ik=1.8+3.0i, respectively. The simulated results well reproduced the observed melting rate and the near-complete-melting and complete-melting conditions were obtained for I o = 160mJ/cm2 and 180mJ/cm2, respectively. It was found that larger grains were obtained in the near-complete-melting condition. Our MD simulations also suggest that nucleation occurs first in a-Si and subsequent crystallization proceeds toward l-Si in the near-complete-melting case.

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1. Hatano, M., Moon, S., Lee, M., Suzuki, K. and Grigoropoulos, C. P.: J. Appl. Phys. 87, 36 (2000).
2. Munetoh, S., Kuranaga, T., Lee, B. M., Motooka, T., Endo, T. and Warabisako, T.: Dig.Tech. Papers AM-LCD' 05, 295 (2005).
3. Munetoh, S., Mitani, T., Kuranaga, T. and Motooka, T.: MRS Proc. 0958-L07–07(2006)
4. Tersoff, J.: Phys. Rev. B 38, 9902 (1988).
5. Tersoff, J.: Phys. Rev. B 39, 5566 (1989).
6. Motooka, T., Nisihira, K., Munetoh, S., Moriguchi, K. and Shintani, A., Phys. Rev. B 61, 8537 (2000)

Keywords

Crystallization Processes of Amorphous Si During Excimer Laser Annealing in Complete-melting and Near-complete-Melting Conditions: A Molecular Dynamics Study

  • Tomohiko Ogata (a1), Takanori Mitani (a2), Shinji Munetoh (a3) and Teruaki Motooka (a4)

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