Skip to main content Accessibility help
×
Home

Crystallinity, Morphology, and Conductivity of Boron-Doped Microcrystalline Silicon

  • G. Rajeswaran (a1), J. Tafto (a1), R. L. Sabatini (a1) and P. E. Vanier (a1)

Abstract

Boron-doped microcrystalline (μc) silicon films produced by rf glow discharge from dilute (1%) mixtures of SiH4 in H2 show a critical dependence of conductivity on deposition conditions. The dark conductivity was related to the microscopic features using electron microscopy. The μc−Si:H films contain clusters of crystallites embedded in an amorphous matrix. The size of the crystalline clusters is typically 0.2 μm in diameter, and the size of the individual crystallites is about 2.5 nm. Electron micrographs of samples prepared at substrate temperatures Ts=135°C, 150°C, 165°C, and 180°C show that the number of crystalline clusters increases with Tsup to 165°C. At Ts=180°C, the crystallites completely disappear. When the concentration of SiH4 in H2 is decreased to 0.25%, the microstructure shows a high density of crystallites with no apparent clustering.

Copyright

References

Hide All
1. Hamakawa, Y., Fujimoto, K., Okuda, K., Kashima, Y., Nonomura, S., and Okamoto, H., Appl. Phys. Lett. 43 (7), 644646 (1983).
2. Mishima, Y., Miyazaki, S., Hirose, M., and Osaka, Y., Phil. Mag. B 46, 1 (1982).
3. Willeke, G., Spear, W. E., Jones, D. I., and LeComber, P. G., Phil. Mag. B 46, 177 (1982).
4. Moss, S. C. and Graczyk, J. F., Phys. Rev. Lett. 23, 1167 (1969).
5. Kampas, F. J., J. Appl. Phys. 53, 6408 (1982).
6. Rajeswaran, C., Kampas, F. J., Vanier, P. E., Sabatini, R. L., and Tafto, J., Appl. Phys. Lett (in press).

Crystallinity, Morphology, and Conductivity of Boron-Doped Microcrystalline Silicon

  • G. Rajeswaran (a1), J. Tafto (a1), R. L. Sabatini (a1) and P. E. Vanier (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed