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Cross-Sectional Tem Sample Preparation of Phase-Change Optical Disk by Ion Milling

  • T. Kouzaki (a1), K. Yoshioka (a2) and E. Ohno (a3)

Abstract

It is very difficult to prepare cross-sectional TEM samples for phase-change optical disks by conventional argon ion milling because of the difference of ion milling rates between multilayers and the polymer substrate. We have been successful in preparing samples of those optical disks by ion milling method with dissolution of the polymer substrate in advance. The cross-sectional structure was observed more clearly in this method rather than in ultramicrotome method.

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[1] Ohota, T., et al., Million cycle overwritable phase change optical disk media Proc. SPIE 1078, 27 (1989)
[2] Hong, S.K., Park, G.S., Lee, J.S., Hong, H.C., Lee, J.H., and Yoon, S.Y., Proceedings of the Fifty Second Annual Meeting of the Japanese Society of Electron Microscopy, 144 (1996)
[3] Libera, M., Nguyen, T.A., and Hwang, C., Mat.Res.Soc.Symp.Proc., 199,243 (1990)

Cross-Sectional Tem Sample Preparation of Phase-Change Optical Disk by Ion Milling

  • T. Kouzaki (a1), K. Yoshioka (a2) and E. Ohno (a3)

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