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Cross-Sectional Tem Sample Preparation of Phase-Change Optical Disk by Ion Milling

Published online by Cambridge University Press:  10 February 2011

T. Kouzaki ,
K. Yoshioka  and
E. Ohno
T. Kouzaki
Affiliation:
Matsushita Technoresearch, Inc., Moriguchi, Osaka 570, Japan
K. Yoshioka
Affiliation:
Optical Disk Systems Division, Matsushita Electric Industrial Co., Ltd., Kadoma, Osaka 571, Japan
E. Ohno
Affiliation:
Optical Disk Systems Development Center, Matsushita Electric Industrial Co., Ltd., Moriguchi, Osaka 570, Japan
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Abstract

It is very difficult to prepare cross-sectional TEM samples for phase-change optical disks by conventional argon ion milling because of the difference of ion milling rates between multilayers and the polymer substrate. We have been successful in preparing samples of those optical disks by ion milling method with dissolution of the polymer substrate in advance. The cross-sectional structure was observed more clearly in this method rather than in ultramicrotome method.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 480: Symposium Z – Specimen Preparation for Transmission Electron Microscopy…IV , 1997 , 251
Copyright
Copyright © Materials Research Society 1997

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References

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