Skip to main content Accessibility help
×
Home

Corrosion Behaviour of Aluminum Metallization During Aqueous Exposure

  • Y. C. Koo (a1), T. L. Walzak (a2) and R. D. Davidson (a1)

Abstract

It is known that aluminum will readily form aluminum hydroxide during aqueous exposures. Thick oxide layers with a typical pseudoboehmite (fibre-like network) structure and bayerite crystals were observed on the aluminum metallization after the aqueous cleaning process. The study investigated the effect of a deionized (DI) water cleaning process (recently implemented to replace CFC-based cleaning technology) on the surface chemistry and corrosion behaviour of aluminum wire bond pads. The study also correlated the wire bond yield and oxide thickness with various water cleaning process parameters. The wire bond yield and reliability issues are discussed briefly.

Copyright

References

Hide All
1. Allgeyer, D.F. and Pratz, E.H., Surface and Interface Analysis, 18, 465 (1992)
2. Alwitt, R.S., Oxides and Oxide Films, ed. Diggle, J.W. and Vigh, A.K., Marcel Dekker Inc. Press, NY. 4, 169 (1974)
3. Alwitt, R.S., J. Electrochem. Soc. Solid-State Science and Technology, 121, (10), 1322 (1974)
4. Lanford, W.A., Alwitt, R.S. and Dyer, C.K., J. Electrochem. Soc. Solid-State Science and Technology, 127, (2), 405 (1980)
5. Clarke, N., Danielsson, L.G. and Sparen, A., Int. J. of Environ. Ana. Chem., 48, 77, (1992)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed