Hostname: page-component-84b7d79bbc-2l2gl Total loading time: 0 Render date: 2024-07-30T23:53:58.627Z Has data issue: false hasContentIssue false
  • English
  • Français

Correlations Between the Substrate Temperature, Properties and Tribological Performance of Sputter-Deposited Amorphous Carbon Films

Published online by Cambridge University Press:  15 February 2011

E. Mounier ,
P. Juliet ,
E. Quesnel ,
Y. Pauleau  and
M. Dubus
E. Mounier
Affiliation:
CEA, Nuclear Research Center (CENG), CEREM-DEM-SGSA-LTS, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.
P. Juliet
Affiliation:
CEA, Nuclear Research Center (CENG), CEREM-DEM-SGSA-LTS, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.
E. Quesnel
Affiliation:
CEA, Nuclear Research Center (CENG), CEREM-DEM-SGSA-LTS, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.
Y. Pauleau
Affiliation:
CEA, Nuclear Research Center (CENG), CEREM-DEM-SGSA-LTS, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.
M. Dubus
Affiliation:
DRFMC-SPMM-PI, 17 Rue des Martyrs, 38054 Grenoble Cedex 9, France.
Get access

Abstract

Amorphous carbon films have been deposited on various grounded substrates by direct current (DC) magnetron sputtering from a graphite target in an argon discharge. The argon pressure and sputtering power density were fixed at 0.25 Pa and 2.65 W cm−2, respectively. The substrate temperature was varied from 50 to 350°C. The hydrogen content determined by ERDA and the electrical resistivity of films were found to be dependent on the base pressure in the deposition chamber and substrate temperature. The mass density of films evaluated from RBS data and compressive residual stresses in the films decreased with increasing substrate temperature from 2.2 to 1.4 g cm−3 and - 0.6 to - 0.2 GPa, respectively. The friction coefficient and wear rate of about 2-μm-thick carbon films deposited on polished stainless steel disks were determined by alumina ball-on-disk tribological measurements conducted in dry air under a load of 4.9 N with a sliding velocity of 10 m min−1 for 105 cycles. The tribological performance of carbon-coated disks are correlated with the deposition temperature and physical characteristics of carbon films.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 383: Symposium I – Mechanical Behavior of Diamond and Other Forms of Carbon , 1995 , 465
Copyright
Copyright © Materials Research Society 1995

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Grill, A. and Meyerson, B.S., in Synthetic Diamond: Emerging CVD Science and Technology, edited by Spear, K.E. and Dismukes, J.P. (Wiley, New York, 1993).Google Scholar
2. Miyake, S. and Kaneko, R., Thin Solid Films 212, 256 (1992).Google Scholar
3. Cuomo, J.J., Doyle, J.P., Bruley, J. and Liu, J.C., Appl. Phys. Lett. 58, 466 (1991).Google Scholar
4. He, X., Li, W. and Li, H., J. Vac. Sci. Technol. A 11, 2964 (1993).Google Scholar
5. Grill, A., Wear 168, 143 (1993).Google Scholar
6. Singer, I.L., in Fundamentals of Friction : Macroscopic and Microscopic Processes, edited by Singer, I.L. and Pollock, H.M., NATO-ASI Series, Serie E : Applied Sciences, Vol.220 (Kluwer Academic Publishers, Dordrecht, The Netherlands, 1992), p. 237.Google Scholar
7. Marchon, B., Heiman, N. and Khan, M.R., IEEE Trans. Magn. 26, 168 (1990).Google Scholar
8. Strom, B.D., Bogy, D.B., Bhatia, C.S. and Bhushan, B., ASME J. Tribol. 113, 689 (1991).Google Scholar
9. Hilden, M., Lee, J., Ouano, G., Nayak, V. and Wu, A., IEEE Trans. Magn. 26, 174 (1990).Google Scholar
10. Mounier, E., Juliet, P., Quesnel, E. and Pauleau, Y., Surf. Coat. Technol. (to be published in 1995).Google Scholar
11. Stoney, G., Proc. R. Soc. London Ser.A 82, 172 (1909).Google Scholar
12. Leplan, H., Geenen, B., Robic, J.Y. and Pauleau, Y., J. Appl. Phys. 78, (to be published in 1995).Google Scholar
13. Pauleau, Y., in Materials and Processes for Surface and Interface Engineering, edited by Pauleau, Y., NATO-ASI Series, Serie E : Applied Sciences, Vol.290 (Kluwer Academic Publishers, Dordrecht, The Netherlands, 1995), p.475.Google Scholar