Skip to main content Accessibility help
×
Home

Correlation of Oxygen and Recombination Centers on a Microscale in Asgrown Czochralski Silicon Crystals

  • K. Nauka (a1), H. C. Gatos (a1) and J. Lagowski (a1)

Abstract

Quantitative microprofiles of the interstitial oxygen concentration and of the excess carrier lifetime, with a spacial resolution of about 20 μm, were obtained in as-grown dislocationfree CZ-Si crystals employing a double laser absorption technique. It was found that maxima (minima) in oxygen concentration along the crystal growth direction coincide with minima (maxima) of the lifetime. It was further found that the relation between changes in oxygen concentration and in lifetime varies in the radial direction indicating that “as-grown” oxygen precipitates are involved in lifetime limiting processes.

Copyright

References

Hide All
1. Jastrzebski, L., Trans. IEEE ED- 29, 475 (1982).
2. Patel, J.R., Semiconductor Silicon 1981, edited by Huff, H.R., Kriegler, R.J. and Takeishi, Y. (Electrochemical Society, New York, 1981), p. 189.
3. Ohsawa, A., Honda, K., Okhawa, S. and Ueda, R., Appl. Phys. Lett. 36, 147 (1980).
4. Rava, P., Gatos, H.C. and Lagowski, J., Appl. Phys. Lett. 38, 274 (1981).
5. Mroczkowski, J.A., Stanley, J.F., Reine, M.B., LoVecchio, P. and Polla, D.L., Appl. Phys. Lett. 38, 26 (1981).
6. Jastrzebski, L., Lagowski, J. and Gatos, H.C., J. Electrochem. Soc. 126, 260 (1979).
7. ASTM Standards, F 122–74 (Reappr. 1980).
8. Jastrzebski, L., Zounzucchi, P., Thebault, D. and Lagowski, J., J. Electrochem. Soc. 129, 1638 (1982).
9. Miyagi, M., Wada, K., Osaka, J. and Inohue, N., Appl. Phys. Lett. 40, 719 (1982).

Correlation of Oxygen and Recombination Centers on a Microscale in Asgrown Czochralski Silicon Crystals

  • K. Nauka (a1), H. C. Gatos (a1) and J. Lagowski (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed