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Convection Effects in Epitaxial Reactors: an Experimental and Theoretical Study

  • P. B. Chinoy (a1), P. D. Agnello (a1) and S. K. Ghandhia (a1)

Abstract

An experimental and theoretical study has been undertaken of the effects of natural and forced convection in horizontal epitaxial reactors. The epitaxial growth of GaAs was used as the experimental vehicle for this study. A mathematical model for mass, momentum and energy transfer in the reactor was developed. Excellent correlation between modeled and experimental results was demonstrated over a wide range of reactor pressures and susceptor geometries. Recirculation of hot gases, caused by natural convection, was found to result in a strong pressure dependence of growth rate at higher susceptor slopes. Low reactor pressures have been shown to be a more effective way to eliminate recirculation than high gas flow rates.

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1. Baliga, B.J. and Ghandhi, S.K., J. Electrochem. Soc. 121, 1642 (1974).
2. Ludowise, M.J., Cooper, C.B. and Saxena, R.R., J. Electron. Mater. 10, 1051 (1981).
3. Chinoy, P.B., Agnello, P.D. and Ghandhi, S.K., J. Electron. Mater. 12, 493 (1988).
4. Reep, D.H. and Ghandhi, S.K., J. Crys. Growth, 61, 449 (1983).
5. Patankar, S.V., Numerical Heat Transfer and Fluid Flow, (Hemisphere Publishing Corp., New York, 1980), pp. 25153.

Convection Effects in Epitaxial Reactors: an Experimental and Theoretical Study

  • P. B. Chinoy (a1), P. D. Agnello (a1) and S. K. Ghandhia (a1)

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