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Conduction and Valence Band Offsets at the Hydrogenated Amorphous Silicon-Carbon/Crystalline Silicon Interface Via Capacitance Techniques

Published online by Cambridge University Press:  01 January 1993

John M. Essick
Affiliation:
Department of Physics, Occidental College, Los Angeles, CA 90041
Richard T. Mather
Affiliation:
Department of Physics, Occidental College, Los Angeles, CA 90041
Murray S. Bennett
Affiliation:
Thin Film Division,Solarex Corporation, Newtown ,PA 18940
James Newton
Affiliation:
Thin Film Division,Solarex Corporation, Newtown ,PA 18940
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Abstract

Heterostructure Schottky diode samples each composed of a sub-micron thick layer of intrinsic hydrogenated amorphous silicon-carbon (a-Si1−xCx:H) deposited on an n-type crystalline silicon (c-Si) substrate are used to measure the a-Si1−xCx:H/c-Si band offsets via junction capacitance techniques. The samples range in carbon concentration from x=0.0−0.3. First, a thermally activated capacitance step due to the response of defects at the amorphous/crystalline interface is evident in capacitance vs. temperature spectra taken on all these samples. The bias-dependence of this step’s activation energy provides a direct measure of the a-Si1−xCx:H/c-Si interface potential as a function of c-Si depletion width in each sample. By application of Poisson’s equation, we find that the a-Si1−xCx:H/c-Si conduction band offset ΔEc. increases from 0.00 to 0.10 eV as x increases from 0.00 to 0.26. Second, while under reverse-bias at low temperature, we optically pulsed each sample with c-Si band-gap light to create trapped holes at the a-Si1−xCx:H/c-Si valence band offset ΔEV. By noting the threshold for the subsequent optical release of these trapped holes by sub-band gap light, we found that ΔEV increases from 0.67 to ≥0.83 eV as x increases from 0.00 to 0.26.

Type
Research Article
Copyright
Copyright © Materials Research Society 1993

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References

REFERENCES

1. Smith, F.W., J. Appl. Phys. 55, 764 (1984).Google Scholar
2. Fang, R.C. and Ley, L., Phys. Rev. B40, 3818 (1989).Google Scholar
3. Evangelisti, F., J. Non-Cryst. Solids 77/78, 969 (1985).Google Scholar
4. Essick, J.M. and Cohen, J.D., Mater. Res. Soc. Sym. Proc. 149, 699 (1989).Google Scholar
5. Essick, J.M. and Cohen, J.D., Appl. Phys. Lett. 55, 1232 (1989).Google Scholar
6. Lang, D.V., Cohen, J.D. and Harbison, J.P., Phys. Rev B25, 5285 (1982).Google Scholar
7.Performed by Charles Evans & Associates, Redwood City, CA.Google Scholar
8. Wronski, C.R., Lee, S., Hicks, M. and Kumar, S., Phys. Rev. Lett. 63, 1420 (1989).Google Scholar