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Computer-Controlled Fabrication of Concentric Multilayer Fresnel Zone Plate for Synchrotron Radiation Hard X-Ray

  • Masato Yasumoto (a1) (a2), Shigeharu Tamura (a3) (a2), Nagao Kamijo (a4) (a2), Yoshio Suzuki (a2), Mitsuhiro Awaji (a2), Akihisa Takeuchi (a2), Hidekazu Takano (a2), Yoshiki Kohmura (a5) and Katsumi Handa (a6)...

Abstract

A Fresnel zone plate (FZP) is a micro-focusing optical element of synchrotron radiation hard X-ray. Our developed multilayer FZP produced a sub-micron size spot at the hard X-ray energy and the focusing efficiency is about 25%. However the higher efficiency FZP is required to utilize the sub-micron probe in microscopy, diffraction and imaging applications. A kinoform FZP composed of gradient refractive index phase zones has the advantage of a high focusing efficiency compared to the conventional multilayer FZP. In order to fabricate the kinoform FZP, we developed a computer-control system. The developed computer-control system automatically operates whole combinatorial deposition processes of the kinoform FZP by inputting the optical parameters of the FZP (focal length, X-ray wavelength, number of zones, zone materials).

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