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Composition and Structure of Spark Eroded Porous Silicon

Published online by Cambridge University Press:  28 February 2011

R. E. Hummel ,
S.-S. Chang ,
M. Ludwig  and
A. Morrone
R. E. Hummel
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL
S.-S. Chang
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL
M. Ludwig
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL
A. Morrone
Affiliation:
Department of Materials Science and Engineering, University of Florida, Gainesville, FL
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Abstract

Porous silicon which has been prepared by a “dry” technique, that is, by spark erosion, yields similar photoluminescence spectra as anodically etched porous silicon which has been prepared in aqueous solutions. Fourier transform infrared spectra reveal that the dominant features in spark eroded silicon are the Si-O-Si stretching mode and the Si-O-Si bending mode. No infrared vibrational modes characteristic for siloxene have been found in spark eroded Si. Results from X-ray and electron diffraction studies suggest that spark eroded Si involves minute polycrystalline silicon particles which are imbedded in an amorphous matrix.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 283: Symposium F – Microcrystalline Semiconductors–Materials Science and Devices , 1992 , 45
Copyright
Copyright © Materials Research Society 1993

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References

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