No CrossRef data available.
Article contents
Comparison of Soi Technologies
Published online by Cambridge University Press: 22 February 2011
Abstract
Silicon-on-Insulator (SOI) technologies are becoming more important as CMOS becomes the preferred technology for VLSI. The progress of the three most actively researched SOI technologies, beam-recrystallized SOI, implanted buried oxide and Full Isolation by Porous Oxidized Silicon will be summarized in this paper.
- Type
- Research Article
- Information
- Copyright
- Copyright © Materials Research Society 1984