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Comparison of Performance of an Analytical Electron Microscope at 300 and 100 kV*

  • J. Bentley (a1), E. A. Kenik (a1), P. Angelini (a1), A. T. Fisher (a1), P. S. Sklad (a1), G. L. Lehman (a2) and J. A. Horton (a1)...

Abstract

Preliminary results on the performance of an analytical electron microscope (AEM) operating at 300 kV have been obtained and compared with the performance at 100 kV. Some features of the anticipated improvements for transmission electron microscopy (TEM) imaging, convergent beam electron diffraction (CBED), energy dispersive X-ray spectroscopy (EDS), and electron energy loss spectroscopy (EELS) have been studied from the aspect of materials science applications. The electron microscope used was a Philips EM430T operated with a LaB6 cathode and equipped with EDAX 9100/70 EDS and Gatan 607 EELS systems.

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Research sponsored by the Division of Materials Sciences, . S. Department of Energy under contract DE-ACO5-840R21400 with Martin Marietta Energy Systems, Inc.

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Comparison of Performance of an Analytical Electron Microscope at 300 and 100 kV*

  • J. Bentley (a1), E. A. Kenik (a1), P. Angelini (a1), A. T. Fisher (a1), P. S. Sklad (a1), G. L. Lehman (a2) and J. A. Horton (a1)...

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