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Comparison of Different Thickness Measurements of Oxide Films on Silicon
Published online by Cambridge University Press: 25 February 2011
Abstract
The thermal oxidation of silicon in dry oxygen is examined with three different thickness measurements: Ellipsometry, transmission electron microscopy and step-profile measurements. The oxidation kinetics follow a linear-parabolic relationship throughout the measured thickness range. Previous deviations from linear-parabolic behavior result from inaccurate ellipsometer measurements of film thickness for films thinner than 0.05 /zm.
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- Copyright © Materials Research Society 1992