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Comparative Study of MVHF and RF Deposited Large Area Multi-junction Solar Cells Incorporating Hydrogenated Nano-Crystalline Silicon

  • Xixiang Xu (a1), Yang Li (a2), Scott Ehlert (a3), Tining Su (a4), Dave Beglau (a5), David Bobela (a6), Guozhen Yue (a7), Baojie Yan (a8), Jinyan Zhang (a9), Arindam Banerjee (a10), Jeff Yang (a11) and Subhendu Guha (a12)...


We report our investigations of large area multi-junction solar cells based on hydrogenated nano-crystalline silicon (nc-Si:H). We compared results from cells deposited by RF (13.56 MHz) at lower deposition rate (˜3 Å/s) and by Modified Very High Frequency (MVHF) at higher rate (≥ 10 Å/s). With optimized process conditions and cell structures, we have obtained ˜12% initial small active-area (˜0.25 cm2) efficiency for both RF and MVHF cells and 10˜11% large aperture-area (˜400 cm2) encapsulated MVHF cell efficiency for both a-Si:H/nc-Si:H double-junction and a-Si:H/nc-Si:H/nc-Si:H triple-junction structures on Ag/ZnO coated stainless steel substrate.



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[1] Yan, B. Yue, G. and Guha, S. Mater. Res. Soc. Symp. Proc. Vol. 989, 2007, p. 335.
[2] Xu, X. Yan, B. Beglau, D. Li, Y. DeMaggio, G. Yue, G. Banerjee, A. Yang, J. Guha, S. Hugger, P. and Cohen, D. Mater. Res. Soc. Symp. Proc. Vol. 1066, 2008, p. 325.
[3] Ganguly, G. Yue, G. Yan, B. Yang, J. Guha, S. Conf. Record of the 2006 IEEE 4th World Conf. on Photovoltaic Energy Conversion, Hawaii, USA, May 7-12, 2006, p.1712.



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