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A Combined Thermodynamic and Kinetic Approach to the Metallization of GaAs

  • Y. Austin Chang (a1)

Abstract

A combined thermodynamic/kinetic methodology was presented to give a rational approach to the metallization of n-GaAs when a reciprocal system of GaAs-MδsGa-MsM'-MAs exists. Fortunately, for many quaternary systems consisting of Ga-M-M'-As, such a reciprocal system does exist. This methodology may be used either for Schottky enhancement or ohmic contacts to n-GaAs. Two examples were used to illustrate the approach and preliminary results were given.

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References

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A Combined Thermodynamic and Kinetic Approach to the Metallization of GaAs

  • Y. Austin Chang (a1)

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