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Combined Microstructure X-Ray Optics; Multilayer Diffraction Gratings

Published online by Cambridge University Press:  25 February 2011

Troy W. Barbee Jr
Troy W. Barbee Jr*
Affiliation:
Lawrence Livermore National Laboratory, Livermore, CA 94550
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Abstract

Multilayers are man-made microstructures engineered to vary in depth that are now of sufficient quality to be used as x-ray, soft x-ray and extreme ultraviolet optics. Gratings are in-plane man-made microstructures which have been used as optic elements for most of this century. Joining of these two optical elements to form combined microstructure optics has the potential for greatly enhancing both the resolution and the throughput attainable in these spectral ranges. Experimental results for multilayer gratings are presented and discussed. It will be demonstrated that multilayer diffraction gratings act as x-ray prisms and are high efficiency dispersion elements.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 103 , 1987 , 307
Copyright
Copyright © Materials Research Society 1988

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References

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