Skip to main content Accessibility help
×
Home

Chemical Analyses of Sol/Gel Surfaces and Thin Films

  • Carlo G. Pantano (a1), C. A. Houser (a1) and R. K. Brow (a1)

Abstract

The application of surface analysis techniques to the characterization of sol/gel surfaces and thin films is described. Secondary-ion mass spectroscopy (SIMS), x-ray photoelectron spectroscopy (XPS) and sputter-induced photon spectroscopy (SIPS) are used to measure the composition of multicomponent silicate films, the relative water content of alumina films, the nitrogen content of ammonia treated silica films, and the depth profiles for films on black chrome. The determination of chemical structure using XPS and SIMS is also discussed. Finally, a brief introduction to temperature-programmed desorption (TPD) and its potential for studying surface chemical reactions, in situ, is presented.

Copyright

References

Hide All
1. Schroeder, H., Oxide Layers Deposited from Organic Solutions, Phys. Thin Films, 5, 7 (1969).
2. Yoldas, B. E. and O'Keefe, T. W., Antireflective Coatings Applied from Metal-Organic Derived Liquid Precursors, Appl. Opt., 18, 3133 (1979).
3. Pantano, C. G., Glaser, P. M. and Armbrust, D. H., Nitridation of Silica Sol/Gel Thin Films in Ultrastructure Processing of Ceramics, Glasses and Composites, Hench, and Ulrich, , Eds., (John Wiley, New York, 1983).
4. Glaser, P. M. and Pantano, C. G., Effect of the H2O/TEOS Ratio Upon the Preparation and Nitridation of Silica Sol/Gel Films, J. Non-Cryst. Sol., 63, 209 (1984).
5. Czanderna, A. W., Editor, Methods of Surface Analysis (Elsevier 1975).
6. Pantano, C. G., Surface and In-Depth Analysis of Glass and Ceramics, Am. Ceram. Soc. Bull., 60 (11), 1154 (1981).
7. Smith, G. and Pantano, C. G., SIMS Studies of Glass Thin Films Prepared with Sol/Gel Techniques, Appl. Surf. Sci., 9 345 (1981).
8. Brinker, C. J. and Mukherjee, S. P., Comparison of Sol-Gel-Derived Thin Films with Monoliths in a Multicomponent Silicate Glass System, Thin Solid Films, 77, 141 (1981).
9. Pettit, R. B. and Brinker, C. J., Sol-Gel Protective Coatings for Black Chrome Solar Selective Films, SPIE, 324, 176 (1982).
10. Brow, R. K. and Pantano, C. G., Composition and Chemical Structure of Nitrided Silica Gel, in this volume.
11. Bach, H., Ion Beam Induced Radiation Applied to Investigations of Thin Surface Layers on Glass Substrates, J. Non-Cryst. Sol., 19, 65 (1975).
12. Tolk, N. H., et al. , In Situ Spectrochemical Analysis of Solid Surfaces by Ion Beam Sputtering, Anal. Chem., 49, 16A (1977).
13. Colton, R. J., Molecular Secondary Ion Mass Spectrometry, J. Vac. Sci. Technol., 18(3), 737 (1981).
14. Benninghoven, A., et al. , Comparative Study of Si(111), Silicon Oxide, SiC, and Si3N4 Surfaces by (SIMS), Thin Solid Films, 28, 59 (1975).
15. Hair, M. L., Hydroxyl Groups on Silica Surfaces, J. Non-Cryst. Sol., 19 (1), 299 (1975).
16. Ohuchi, F. and Chowdry, U., Temperature Programmed Reaction and Desorption Studies on Methanol Oxidation Catalysts, in Proc. 12th No. Am. Thermal Analysis Society Meeting, Williamsburg, VA, 1983.

Chemical Analyses of Sol/Gel Surfaces and Thin Films

  • Carlo G. Pantano (a1), C. A. Houser (a1) and R. K. Brow (a1)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed