Skip to main content Accessibility help
×
Home

Characterizations of Boron Carbon Nitride and Boron Carbide Films Synthesized by PECVD

  • Qingguo Wu (a1), Mandyam Sriram (a2), Jim Sims (a3), Haiying Fu (a4), Sesha Varadarajan (a5), Tim Archer (a6), Nathan J. Trujillo (a7) and Karen K. Gleason (a8)...

Abstract

Thin films of boron carbon nitride (BCN) and boron carbide (BC) were synthesized by plasma enhanced chemical vapor deposition (PECVD) using two different reactant chemistries: (i) N,N’,N” – trimethylborazine (TMB); (ii) dilute diborane (5% in Ar) and hydrocarbon as precursor materials. Fourier transform infrared spectroscopy (FTIR), Raman spectroscopy, Nano-Indentor, Flexus stress instrument and x-ray photoelectron spectroscopy were used to study the deposited films. The BC films are much more stable than BCN films under high humidity (100%) environment. Both BCN and BC films are very stable under atmospheric conditions. A high compressive stress of -4.2 GPA was achieved by conventional PECVD, which show promising applications in high performance ultra large-scale integrated circuit (ULSI) devices.

Copyright

References

Hide All
1. Riedel, R., Adv. Mater. 6, 549 (1994).
2. Sugiyama, T., Tai, T., Okamoto, A., Yoshitake, M., Sugino, T., Diamond Relat. Mater. 12, 11131116 (2003).
3. Tai, T., Sugiyama, T., Sugino, T., Diamond Relat. Mater. 12, 11171121 (2003).10.1016/S0925-9635(02)00344-8
4. Liu, J., Loh, K. P., Lin, M., Foo, Y. L., Wang, W. D., Chi, D. Z., J. Appl. Phys. 96, 66796684 (2004).
5. Pascual, E., Martínez, E., Esteve, J. and Lousa, A., Diamond Relat. Mater. 8, 402405 (1999).
6. Lousa, A., Esteve, J., Muhl, S. and Martínez, E., Diamond Relat. Mater. 9, 502505 (2000).
7. Grill, A., Patel, V., Appl. Phys. Lett. 79, 803805 (2001).
8. Ogawa, E.T., et al., Proc. Intl. Reliability Physics Symp. pp. 166172, 2003.
9. van den Hoek, Wilbert G. M., Solid State Technology, November 2005.
10. Oliveira, J. C., Oliveira, M. N., and Conde, O., Surface and Coating Tech. 80, 100104 (1996).
11. Silvestre, A. J., Santos, M. J. and Conde, O., Key Eng. Mater. 56, 230232 (2002).
12. Jamroz, P. and Zyrnicki, W., Diamond Relat. Mater. 14, 14981507 (2005).
13. Afanasyev-Charkin, I. V. and Nastasi, M., J. Appl. Phys. 96, 76817685 (2004).
14. Sharma, R. C. and Koshi, M., Spectrachimica Acta Part A 65, 787791 (2006).
15. Nakamura, K., J. Electrochem. Soc. 133, 1120 (1986).
16. Yuzuriha, T. H., Hess, D. W., Thin Solid Films 140, 199 (1986).
17. Bath, A., van der Put, P. J., Bechet, J. G. M., Schoonman, J., Lepley, B., J. Appl. Phys. 70, 4366 (1991).
18. Deshpande, S. V., Gulari, E., Harris, S. J., Weiner, A. M., Appl. Phys. Lett. 65, 1757 (1994).
19. Peng, J., Zhang, P., Guo, Y., Chen, G. H., Mater. Lett. 29, 191 (1996).
20. Popov, C., Jelinek, M., vanov, B. I., Yomov, R. I., Kulisch, W., Diamond Relat. Mater. 8, 577 (1999).
21. Werheit, H. et al, Proceedings of the 10th International Symposium on Boron, Borides and Related Compounds, AIP Conference Proceedings, New York, 231, p. 355359 (1991).
22. Sreejith, K., Nuwad, J., Pillai, C.G.S., Appl. Surf. Sci. 252, 296 (2005).
23. Pan, Y. Q., Yin, Y., Diamond Relat. Mater. 16, 220224 (2007).

Keywords

Characterizations of Boron Carbon Nitride and Boron Carbide Films Synthesized by PECVD

  • Qingguo Wu (a1), Mandyam Sriram (a2), Jim Sims (a3), Haiying Fu (a4), Sesha Varadarajan (a5), Tim Archer (a6), Nathan J. Trujillo (a7) and Karen K. Gleason (a8)...

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed