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Characterization of Zinc Oxide Thin Films Deposited by rf Magnetron Sputtering on Mylar Substrates

  • Elvira Fortunato (a1), Patrícia Nunes (a1), António Marques (a1), Daniel Costa (a1), Hugo Águas (a1), Isabel Ferreira (a1), Maria E. V. Costa (a2) and Rodrigo Martins (a1)...

Abstract

Aluminium doped zinc oxide thin films (ZnO:Al) have been deposited on polyester (Mylar type D, 100 µm thickness) substrates at room temperature by r.f. magnetron sputtering. The structural, morphological, optical and electrical properties of the deposited films have been studied. The samples are polycrystalline with a hexagonal wurtzite structure and a strong crystallographic c-axis orientation (002) perpendicular to the substrate surface. The ZnO:Al thin films with 85% transmittance in the visible and infra-red region and a resistivity as low as 3.6×10−2 ωcm have been obtained, as deposited. The obtained results are comparable to those ones obtained on glass substrates, opening a new field of low cost, light weight, small volume, flexible and unbreakable large area optoelectronic devices.

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[1] Fortunato, E., Brida, D., Ferreira, I., Águas, H., Nunes, P., Martins, R., Thin Solid Films 383, 310 (2001).
[2] Zhang, D.H., Yang, T.L., Ma, J., Wang, Q.P., Gao, R.W., Ma, H.L., Applied Surface Science 158, 43 (2000).
[3] Yang, T.L., Zhang, D.H., Ma, J., Chen, Y., Ma, H.L., Thin Solid Films 326, 60 (1998).
[4] Fortunato, E., Nunes, P., Costa, D., Brida, D., Ferreira, I., Martins, R., Vacuum (2001), in print.
[5] Nunes, P., Costa, D., Fortunato, E., Martins, R., Vacuum (2001), in print.
[6] Callity, B., “Element of X-ray Diffraction” (Addison-Wesley, London 1959).
[7] Addonizio, M.L., Antonia, A., Cantele, G., Privato, C., Thin Solid Films 349, 93 (1999).
[8] Sarkar, A., Ghosh, S., Chaudhuri, S., Pal, A.K., Thin Solid Films 204, 255 (1991).
[9] Ma, J., Zhang, D., Li, S., Zhao, J., Ma, H., Jpn. J. Appl. Phys. 37, 5614 (1998).
[10] Bond, W.L., J. Appl. Phys. 36, 1674 (1965).

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