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Characterization of SI/SiO2 Interfaces Using Tem Lattice Imaging and X-Ray Micro Diffraction Techniques

  • P. K. Roy (a1) and V. C. Kannan (a1)


This paper discusses two analytical techniques: (i) a high resolution transmission electron microscopy (TEM) technique of imaging Si (111) planes at Si/SiO2 interface, and (ii) an accurate measurement of the stress in silicon (Σsi) just below the interface using x-ray microdiffraction (XRMD) technique. The combination of these two techniques allows us to probe Si/SiO2 interfaces for various oxides (75-250Å) grown by different oxidation processes.



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1. Baglee, D. A. and Shah, P. L., in “VLSI Electronics: Microstructure Science,” Einspruch, N. G. and Larrabe, G. B. eds., Academic Press, NY, 7 165 (1983).
2. Brower, K. L., Phys. Rev. B, 3, 4471 (1986).
3. Kern, W. and Puotinen, D. A., RCA Rev., 31, 187 (1970).
4. Monkowski, J., Solid State Tech., 58, (July 1979).
5. Roy, P. K., “Growth-Modified Thermal Oxidation Process for Thin Oxides,” Filed for U. S. Patent (1988).
6. Roy, P. K. et al. , “Semiconductor Device With Low Defect Density Oxides,” Application for U. S. Patent Serial No. 138, 633 (Dec. 28, 1987).
7. Ourmazd, A., “Defects in Semi-Conductors,” ed. Bardaleeken, H. J. Von, 10, Trans Tech Pub., Sweden (1986).
8. Wagner, C. N. J., Local Atomic Arrangements Studied by X-ray Diffraction, edited by Cohen, J. B. and Hilliard, J. E., (Gorden and Breach, NY), 1965, Chapter 7.
9. Roy, P. K., U. S. Patent No. 4,631,804 (Dec., 1986).
10.Experimental High Resolution Electron Microscopy” by Spence, J. C. H., Clarendon Press, Oxford (1981).
11.Observation of Defects in Crystalline Polymers by High Resolution Electron Microscopy” by Martin, D. T. and Thomas, E. L., MRS Bulletin, 1 27 (1987).
12. Howe, R. T. and Muller, R. S., J. Appl. Phys. 54 4674 (1983).


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