Skip to main content Accessibility help
×
Home

Characterization of Pulsed Laser Beam Mixed AuTe/GaAs Ohmic Contacts

  • K. Wuyts (a1), R.E. Silverans (a1), M. Van Hove (a2) and Van Rossum Van Hove (a2)

Abstract

The formation of pulsed laser processed AuTe/n—GaAs ohmic contacts was investigated using I—V measurements, Rutherford Backscattering, and Mössbauer spectroscopy. Ohmic contact resistances comparable to those of furnace processed AuTe and AuGe/GaAs contacts were measured; however, a much thinner intermixed layer was obtained by the laser processing. No evidence for the formation of a n++—GaAs layer could be derived from the experimental data. The results are more consistent with the model explaining the ohmic conduction mechanism by the formation of a graded heterojunction structure.

Copyright

References

Hide All
1 Zhang, T., Sigmon, T.W., Weiner, K.H. and Carey, P.G., Appl. Phys. Lett. 55(6), 580, (1989)
2 Imanaga, S., Kawai, H., Kajiwara, K., Kaneko, K. and Watanabe, N., J. Appl. Phys. 62(6), 2381 (1989)
3 Baeri, P., Phys. Script. T29, 183 (1989)
4 Sebestyen, T., Sol. Stat. Electr. 25(7), 543 (1982)
5 Rhoderick, E.H. and Williams, R.H., Metal—Semiconductor contacts, 2nd ed. (Clarendon Press, Oxford, 1988), p.204
6 Wuyts, K., Vantomme, A., Silverans, R.E., Van Hove, M. and Van Rossum, M., in Advances in Materials. Processing and Devices in III—V Compound Semiconductors, edited by Sadana, D.K., Eastman, L., and Dupuis, R. (Mater. Res. Soc. Proc. 144, Pittsburgh, PA 1989) pp545550
7 Doolittle, L.R., Nucl. Instrum. Meth B9, 344 (1985)
8 Wuyts, K., Langouche, G. and Silverans, R.E., Hyp. Int. (in press)
9 Langouche, G., Bemelmans, H., Odeurs, J., Borghs, G., de Potter, M., Deraedt, W. and Van Rossum, M., Mat. Sci. For. 3841. 1245 (1989) and G. Langouche, H. Bemelmans (private communication)
10 Wuyts, K., Langouche, G., Vanderstraeten, H., Silverans, R.E., Van Hove, M., Van Rossum, M., Münder, H. and Lüth, H., 1990 MRS Spring Meeting, San Francisco, CA, 1990
11 Kirillov, D., and Chung, Y., Appl. Phys. Lett. 51(11), 846 (1987)

Metrics

Full text views

Total number of HTML views: 0
Total number of PDF views: 0 *
Loading metrics...

Abstract views

Total abstract views: 0 *
Loading metrics...

* Views captured on Cambridge Core between <date>. This data will be updated every 24 hours.

Usage data cannot currently be displayed