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Characterization of Plasma Synthesized Vertical Carbon Nanofibers for Nanoelectronics Applications

  • Jaesung Lee (a1), Philip X.-L. Feng (a1) and Anupama B. Kaul (a2)


We report on the material characterization of carbon nanofibers (CNFs) which are assembled into a three-dimensional (3D) configuration for making new nanoelectromechanical systems (NEMS). High-resolution scanning electron microscopy (SEM) and x-ray electron dispersive spectroscopy (XEDS) are employed to decipher the morphology and chemical compositions of the CNFs at various locations along individual CNFs grown on silicon (Si) and refractory nitride (NbTiN) substrates, respectively. The measured characteristics suggest interesting properties of the CNF bodies and their capping catalyst nanoparticles, and growth mechanisms on the two substrates. Laser irradiation on the CNFs seems to cause thermal oxidation and melting of catalyst nanoparticles. The structural morphology and chemical compositions of the CNFs revealed in this study should aid in the applications of the CNFs to nanoelectronics and NEMS.


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Characterization of Plasma Synthesized Vertical Carbon Nanofibers for Nanoelectronics Applications

  • Jaesung Lee (a1), Philip X.-L. Feng (a1) and Anupama B. Kaul (a2)


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