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Characterization of Plasma Synthesized Vertical Carbon Nanofibers for Nanoelectronics Applications

Published online by Cambridge University Press:  18 May 2012

Jaesung Lee ,
Philip X.-L. Feng  and
Anupama B. Kaul
Jaesung Lee
Affiliation:
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
Philip X.-L. Feng*
Affiliation:
Electrical Engineering, Case Western Reserve University, Cleveland, OH 44106, USA
Anupama B. Kaul*
Affiliation:
Jet Propulsion Laboratory, California Institute of Technology, Pasadena, CA 91109, USA
*
*Corresponding Authors, Email: philip.feng@case.edu, anu.kaul@jpl.nasa.gov
*Corresponding Authors, Email: philip.feng@case.edu, anu.kaul@jpl.nasa.gov
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Abstract

We report on the material characterization of carbon nanofibers (CNFs) which are assembled into a three-dimensional (3D) configuration for making new nanoelectromechanical systems (NEMS). High-resolution scanning electron microscopy (SEM) and x-ray electron dispersive spectroscopy (XEDS) are employed to decipher the morphology and chemical compositions of the CNFs at various locations along individual CNFs grown on silicon (Si) and refractory nitride (NbTiN) substrates, respectively. The measured characteristics suggest interesting properties of the CNF bodies and their capping catalyst nanoparticles, and growth mechanisms on the two substrates. Laser irradiation on the CNFs seems to cause thermal oxidation and melting of catalyst nanoparticles. The structural morphology and chemical compositions of the CNFs revealed in this study should aid in the applications of the CNFs to nanoelectronics and NEMS.

Keywords

electrical propertiesnanoscalenanostructure
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1451: Symposium DD/EE – Nanocarbon Materials and Devices , 2012 , pp. 117 - 122
Copyright
Copyright © Materials Research Society 2012

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References

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