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Characterization of Microporous Silicon Fabricated by Immersion Scanning

Published online by Cambridge University Press:  15 February 2011

E. Bassous
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
M. Freeman
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
J.-M. Halbout
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
S. S. lyer
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
V. P. Kesan
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
P. Munguia
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
S. F. Pesarcik
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
B. L. Williams
Affiliation:
IBM Research Division, T.J. Watson Research Center, Yorktown Heights, NY 10598
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Abstract

A novel immersion scanning technique for making microporous silicon has been successfully applied to blank and lithographically patterned Si substrates. The advantages of the method lie in its simplicity, speed and adaptability to large and odd-size substrates. The photoluminescence (PL) spectra of microporous Si show a continuous decrease in intensity between 200K and 2K, but are fully reversible. Thermal desorption spectroscopy on microporous Si shows a classic hydrogen desorption spectrum which coincides with a quenching of the PL intensity. Under constant excitation, a degradation of PL Intensity occurs in oxygen and wet nitrogen but is only partially reversible in dry N2. Microporous Si PN junctions exhibiting normal I-V characteristics have been successfully fabricated with standard Si VLSI processes. Visible light emission under forward bias is detected which increases linearly In Intensity with Input current. This is the first observation of electroluminescence in the visible region from microporous SI PN junctions.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

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