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Characterization of Lead Zirconate-Titanate Thin Films Prepared by Pulsed Laser Deposition

  • C. K. Chiang (a1), W. Wong-Ng (a1), P. K. Schenck (a1), L. P. Cook (a1), M. D. Vaudin (a1), P. S. Brody (a2), B. J. Rod (a2) and K. W. Bennett (a2)...

Abstract

Dense smooth lead zirconate-titanate thin films have been prepared by excimer laser deposition. The as-deposited films are amorphous as indicated by x-ray powder patterns. Differential scanning calorimetry studies show that the film has a glass transition at 301 °C, and the amorphous to crystalline transformation takes place above 350°C to 650°C. Phase formation as a result of post-deposition heat treatment is described.

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1. Schenck, P.K., Cook, L.P., Zhao, J., Farabaugh, E.N., and Chiang, C.K., Proc. Symposium on Beam Solid Interaction: Physical Phenomena, ed. Myers, E.R. and Kingon, A.I., Mat. Res. Soc., 157A, 587, (1990)
2. Chiang, C.K., Cook, L.P., Schenck, P.K., Brody, P.S., and Benedetto, J.M., “Ferroelectric Thin Films”, Mat. Res. Soc., Vol.200, 133, (1990).
3. Brody, P.S., Rod, B.S., Benedetto, J.M., Bennett, K.W., Cook, L.P., Schenck, P.K., Chiang, C.K. and Wong-Ng, W., Proc. Seventh Intl Symp. on Applic. Of Ferroelectrics, Univ. III, Urbana-Champaign, IL., (1990).
4. Cook, L.P., Vaudin, M.D., Schenck, P.K., Wong-Ng, W., Chiang, C.K., and Brody, P.S., p. 241246 in Thompson, C.V., Tsao, J.Y., and Srolovitz, D.J., eds., Evolution of Thin-Film and Surface Microstructure, Mat. Res. Soc. Symp. Proc., vol.202, (1991).
5. Jaffe, B., Roth, R.S., and Marzullo, S., J. Res. National Bur. Stds., 55, 239, (1955).
6. Cook, L.P., Schenck, P.K., Zhao, J., Farabaugh, E.N., Chiang, C.K. and Vaudin, M.V., Ceramic Transactions: Ceramic Thin and Thick Films, ed. Hiremath, B.V., page 99, (1990).

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Characterization of Lead Zirconate-Titanate Thin Films Prepared by Pulsed Laser Deposition

  • C. K. Chiang (a1), W. Wong-Ng (a1), P. K. Schenck (a1), L. P. Cook (a1), M. D. Vaudin (a1), P. S. Brody (a2), B. J. Rod (a2) and K. W. Bennett (a2)...

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