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Characterization of Ion-Implanted Aluminum and Iron by Spectroscopic Ellipsometry

  • J. S. Brodkin (a1), W. Franzen (a1), R. J. Culbertson (a1) and J. M. Williams (a2)

Abstract

The change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.

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References

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1. Woolam, J.A., Snyder, P.G. and Rost, M.C., Mater. Res. Soc. Proc. 93, 203, (1987).
2. Rauschenbach, R., Kolitxch, A. and Richter, E., Thin Sol.Films, 109, 37, (1983).
3. Ohira, S. and Iwaki, M., Nucl. Inst. Meth. Bl9 /20, 162 (1987).
4. Longworth, G. and Hartley, N.E.W., Thin Sol. Films, 49, 95 (1978).
5. Rauschenbach, R. and Hohmuth, K., Cryst. Res. and Tech. 19, 1425 (1984).

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