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Characterization of Ion-Implanted Aluminum and Iron by Spectroscopic Ellipsometry

  • J. S. Brodkin (a1), W. Franzen (a1), R. J. Culbertson (a1) and J. M. Williams (a2)


The change in the optical constants of aluminum alloy and iron samples caused by implantation with nitrogen and chromium ions has been investigated by spectroscopic ellipsometry. The objective is to develop a method for simple, non-destructive characterization of ion-implanted metals.



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3. Ohira, S. and Iwaki, M., Nucl. Inst. Meth. Bl9 /20, 162 (1987).
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