Hostname: page-component-7c8c6479df-5xszh Total loading time: 0 Render date: 2024-03-29T08:25:11.101Z Has data issue: false hasContentIssue false

Characterization of Inconel/Carbon Multilayer Structures

Published online by Cambridge University Press:  25 February 2011

J. Liu
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
Y. Cheng
Affiliation:
Department of Physics, Arizona State University, Tempe, AZ 85287
M. W. Lund
Affiliation:
Multilayer Optics X-Ray Technology, Inc., Box 7070, University Station, Provo, UT 84602
Q. Wang
Affiliation:
Multilayer Optics X-Ray Technology, Inc., Box 7070, University Station, Provo, UT 84602
A. Higgs
Affiliation:
Center for Solid State Science, Arizona State University, Tempe, AZ 85287
Get access

Abstract

DC magnetron sputtering technique is used to fabricate inconel/carbon multilayers (ML) for applications in soft x-ray optical systems. The ML films were characterized by small angle x-ray scattering (SAXS), high resolution electron microscopy (HREM) and high-angle annular darkfield (HAADF) microscopy techniques. The HREM showed that the ML films are composed of smooth layers of amorphous components. The HAADF showed strong interdiffusion between inconel and carbon. There is no indication of any pure inconel or carbon regions in the ML films.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Kirz, J. and Rarback, H., Rev. Sci. Instrum. 56, 1 (1985).Google Scholar
[2] Bionta, R. M., Ables, E., Clamp, O., Edwards, o. D., Gabriele, P. C., Miller, K., Ott, L. L., Skulina, K. M., Tilley, R. and Viada, T., et. al, Opt. Eng. 29, 576 (1990).Google Scholar
[3] Trail, J. A. and Byer, R. L., Opt. Lett. 14, 539 (1989).Google Scholar
[3] Petford-Long, A. K., Stearns, M. B., Chang, C. -H., Nutt, S. R., Stearns, D. G., Ceglio, N. M. and Hawryluk, A. M., J. Appl. Phys. 61, 1424 (1987).Google Scholar
[5] Pennycook, S. J., Ultramicrosc. 30, 58 (1989).Google Scholar
[6] Liu, J. and Cowley, J. M., Ultramicrosc. 31, 50 (1991).CrossRefGoogle Scholar
[7] Liu, J., Cheng, Y., Cowley, J. M. and Steams, M. B., Ultramicrosc., in press.Google Scholar
[8] Cheng, Y., Liu, J., Stearns, M. B. and Stearns, D. G., Proc. of SPIE (1991), in press.Google Scholar
[9] Liu, J., Cheng, Y., Lewen, G. D. and Steams, M. B., in these proceedings.Google Scholar
[10] Boher, P., Houdy, P. and Schiller, C., Thin Solid Films 175, 161 (1989).Google Scholar