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Characterization of BaTiO3 Thin Films Deposited by Pulsed-Laser Ablation

  • Christopher Scarfone (a1), M. Grant Norton (a1), C. Barry Carter (a1), Jian Li (a1) and James W. Mayer (a1)...

Abstract

Thin films of barium titanate (BaTiOs) have been deposited by pulsed-laser ablation onto (001)-oriented MgO substrates. The films were epitactic as evidenced by both x-ray diffraction and ion-channeling techniques. The film surface appeared smooth and contained a low density of particulates. This latter feature is believed to be due to the formation of target pellets having a very high density.

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