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Characterization of BaTiO3 Thin Films Deposited by Pulsed-Laser Ablation

  • Christopher Scarfone (a1), M. Grant Norton (a1), C. Barry Carter (a1), Jian Li (a1) and James W. Mayer (a1)...


Thin films of barium titanate (BaTiOs) have been deposited by pulsed-laser ablation onto (001)-oriented MgO substrates. The films were epitactic as evidenced by both x-ray diffraction and ion-channeling techniques. The film surface appeared smooth and contained a low density of particulates. This latter feature is believed to be due to the formation of target pellets having a very high density.



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