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Characterization of 0.5 MHz Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns

  • Shirley C. Tsai (a1), Yu L. Song (a2), Yuan F. Chou (a3), Terry K. Tseng (a4), W. J. Chen (a4), J. H. Yang (a5), J. W. Chen (a2) and Chen S. Tsai (a6)...

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This paper presents the experimental results of impedance analysis and longitudinal vibration measurement of micro-fabricated 0.5 MHz silicon-based ultrasonic nozzles. Each nozzle is made of a piezoelectric drive section and a silicon-resonator consisting of multiple Fourier horns each with half wavelength design and twice amplitude magnification. The experimental results verified the simulation prediction of one pure longitudinal vibration mode at the resonant frequency in excellent agreement with the design value. Furthermore, at the resonant frequency, the measured longitudinal vibration amplitude gain at the nozzle tip increases as the number of Fourier horns (n) increases in good agreement with the theoretical value of 2n. Using this design, very high vibration amplitude at the nozzle tip can be achieved with no reduction in the tip cross sectional area. Therefore, the required electric drive power should be drastically reduced, decreasing the likelihood of transducer failure in ultrasonic atomization.

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[1] Lal, A. and White, R.M., Proc. of IEEE Ultrasonics Symposium, 1, 339342, 1996.
[2] Berger, H.L., ILLASS, 1985; Sono-Tek brochure, “Ultrasonic Atomizing Nozzle Systems,” 1991.
[3] Tsai, S.C., Luu, P., Childs, P., and Tsai, C.S., IEEE Transaction on Ultrasonics/ Ferroelectrics and Frequency Control, 46, 139146, 1999; U.S. Patent #5,687,905, 1997, S.C. Tsai.
[4] Tsai, S.C., Luu, P., Childs, P., Teshome, A., and Tsai, C.S., AIP Physics of Fluids, 9, 29092918, 1997.
[5] Tsai, S.C., Tseng, T.K., Song, Y.L., Chou, Y.F., Tsai, C.S., and Chang, P.Z., Mat. Res. Soc. Symp. Proc., 729, MEMS and Bio-MEMS, 221227, 2002.
[6] Eisenmenger, W., Acustica, 9, 327340, 1959.

Characterization of 0.5 MHz Silicon-Based Ultrasonic Nozzles Using Multiple Fourier Horns

  • Shirley C. Tsai (a1), Yu L. Song (a2), Yuan F. Chou (a3), Terry K. Tseng (a4), W. J. Chen (a4), J. H. Yang (a5), J. W. Chen (a2) and Chen S. Tsai (a6)...

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