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The characterization and preparation of porous low dielectric films using various cyclodextrins as template materials

  • Jin-Heong Yim (a1), Jung-Bae Kim (a1), Hyun-Dam Jeong (a1), Yi-Yeoul Lyu (a1), Sang Kook Mah (a1), Jingyu Hyeon-Lee (a1), Kwang Hee Lee (a1), Seok Chang (a1), Lyong Sun Pu (a1) (a2), Y. F. Hu (a3), J.N. Sun (a3) and D.W. Gidley (a3)...

Abstract

Porous low dielectric films containing nano pores (∼20Å) with low dielectric constant (<2.2), have been prepared by using various kinds of cyclodextrin derivatives as porogenic materials. The pore structure such as pore size and interconnectivity can be controlled by changing functional groups of the cyclodextrin derivatives. We found that mechanical properties of porous low-k thin film prepared with mCSSQ (modified cyclic silsesquioxane) precursor and cyclodextrin derivatives were correlated with the pore interconnection length. The longer the interconnection length of nanopores in the thin film, the worse the mechanical properties of the thin film (such as hardness and modulus) even though the pore diameter of the films were microporous (∼2nm).

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1. Hedrick, J.L., Miller, R.D., Hawker, C.J., Carter, K.R., Volksen, W., Yoon, D.Y., Trollsas, M., Adv. Mater., 10, 1049(1998).
2. Nguyen, C.V., Carter, K.R., Hawker, C.J., Hedrick, J.L., Jaffe, R.L., Miller, R.D., Remenar, J.F., Rhee, H.W., Rice, P.M., Toney, M.F., Trollsas, M. and Yoon, D.Y., Chem. Mater., 11, 3080(1999).
3. Mikoshiba, S., and Hayase, S., J. Mater. Chem., 9, 591(1999).
4. Kohl, A.T., Mimna, R., Shick, R., Rhodes, L., Wang, Z.L. and Kohl, P.A., Electrochemical and solid-state Letter, 2(2), 77(1999).
5. Aoi, N., Jpn. J. Appl. Phys., 36, 1355(1997).
6. Yang, S., Mirau, P.A., Pai, C., Nalamasu, O., Reichmanis, E., Pai, J.C., Obeng, Y.S., Seputro, J., Lin, E.K., Lee, H., Sun, J., and Gidley, D.W., Chem. Mater., 14, 369(2002).
7. Polarz, S., Smarsly, B., Bronstein, L., Antonietti, M., Angew. Chem., 113(23), 4549(2001).
8. Yim, J.H, Lyu, Y.Y, Hwang, I.S., Jeong, H.D., Mah, S.K., Hyeon-Lee, J., Lee, K.H., Park, J.G., Hu, Y.F., Sun, J.N., and Gidley, D.W., Abstract of International SEMATECH Ultra Low k Workshop, 31(2002)
9. Yim, J.H, Lyu, Y.Y, Jeong, H.D., Song, S. A., Hwang, I.S., Hyeon-Lee, J., Mah, S.K., Chang, S., Park, J.G., Hu, Y.F., Sun, J.N., and Gidley, D.W., Advanced Functional Materials, 13(5), 386(2003)
10. Croft, A.P. and Bartsch, R.A., Tetrahedron, 39(9), 1417(1983).
11. Yim, J.H., Lyu, Y.Y., Jeong, H.D., Mah, S. K., Hyeon-Lee, J., Hahn, J.H., Kim, G. S., Chang, S., Park, J.G., J. Applied Polymer Science, in press
12. Gidley, D. W., Frieze, W. E., Yee, A.F., Dull, T. L., Ho, H.M. and Ryan, E.T., Phys. Rev. B, Rapid Comm., 60(8), R5157(1999).
13. Gidley, D. W., Frieze, W. E., Dull, T. L., Sun, J., Yee, A. F., Nguyen, C. V. and Yoon, D. Y., Appl. Phys. Lett., 76(10),1282(2000).
14. Dull, T. L., Frieze, W. E., Gidley, D.W., Sun, J.N. and Yee, A.F., J. Phys. Chem. B, 105(20), 4657(2001).

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