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Characteristics of Polyethylene Thin Films Deposited by Ionized Cluster Beam

  • Hiroaki Usui (a1), Kouji Numata (a1), Hitoshi Dohmoto (a1), Isao Yamada (a1) and Toshinori Takagi (a1)...

Abstract

Polyethylene thin films were deposited by the ionized cluster beam (ICB) method. The dielectric, resistivity, and breakdown field measurements showed that the ICB polyethylene films have excellent properties as an electrical insulator. The characteristics of Au/polyethylene/Si MIS diodes and MISFErs indicated that the ICB method can control the film-substrate interface property. The SIMS and ESCAan alyses showed that the ICB films have pure and stable chemical structure.

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1) Usui, H., Naemura, M., Yamada, I., and Takagi, T., Proc. 6th Symp. Ion Sources and Ion-Assisted Technol. (Inst. Elect. Rigs. Japan, Tokyo, 1982) p. 331.
2) Usui, H., Yamada, I., and Takagi, T., Proc. Int. Ion Eng. Cong. -ISIAT'83 & IPAT'83- (Inst. Elect. Engs. Japan, Tokyo, 1982) p. 1247.
3) Usui, H., Naemura, M., Nakanishi, H., Yamada, I., and Takagi, T., Proc. 8th Symp. Ion Sources and Ion-Assisted Technol. (Res. Group Ion Eng., Kyoto Univ., 1984) p. 271
4) Nakanishi, F., Takata, H., Usui, H., Yamada, I., and Takagi, T., Proc. 8th Symp. Ion Sources and Ion-Assisted Technol. (Res. Group Ion Eng., Kyoto Univ., 1985) p. 449.
5) Usui, H., Yamada, L, and Takagi, T., J. Vac. Soc. Technol. A4, 52 (1986).
6) Takagi, T., Yamada, I., Kunori, M., and Kobiyama, S., Proc. 2nd Int. Conf. Ion Sources, 1972, Vienna (Österreichische Studiengesellshaft fdr Atomenergie, Vienna, 1972) p. 790.
7) Takagi, T., Mat. Res. Soc. Symp. Proc. 27, 501 (1984).
8) Usui, H., Yamada, I., and Takagi, T., Proc. Int. Workshop Ionized Cluster Beam Technique (Res. Group Ion Eng., Kyoto Univ., 1986) p. 63.
9) Dohmoto, H., Nakanishi, F., Usui, H., Yamada, L, and Takagi, T., Proc. Int. Workshop Ionized Cluster Beam Technique (Res. Group Ion Eng., Kyoto Univ., 1986), p. 171.
10) Takagi, T., J. Vac. Sci. Technol. A2, 382 (1984).
11) Buzzer, P.D., Soung, D.S., Bell, A.T., J. Appl. Poly. Sci. 27, 3965 (1982).

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Characteristics of Polyethylene Thin Films Deposited by Ionized Cluster Beam

  • Hiroaki Usui (a1), Kouji Numata (a1), Hitoshi Dohmoto (a1), Isao Yamada (a1) and Toshinori Takagi (a1)...

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