Hostname: page-component-8448b6f56d-c47g7 Total loading time: 0 Render date: 2024-04-25T05:57:18.431Z Has data issue: false hasContentIssue false
  • English
  • Français

Characterisation of the mechanical properties of MEMS devices using nanoscale techniques

Published online by Cambridge University Press:  11 February 2011

Nicholas X. Randall  and
Richard A. J. Soden
Nicholas X. Randall
Affiliation:
CSM Instruments Inc., 197 First Avenue, Needham MA 02494, USA
Richard A. J. Soden
Affiliation:
CSM Instruments Inc., 197 First Avenue, Needham MA 02494, USA
Get access

Abstract

This paper focuses on recent developments in the localised characterisation of the mechanical properties of Microsystems and MEMS devices and structures. Conventional indentation techniques provide a highly powerful method for measuring the load and depth response of bulk and coated materials, but can also be used to measure the mechanical properties of very small micro-machined silicon structures. Beam structures, such as are used for accelerometers, need to be characterised in terms of the number of cycles to failure, the spring constant or the energy required to bend the beam by a required amount. Such localised testing needs to be adapted to work at various distances from the origin of the beam with a positioning accuracy of less than a micron. Initial studies have proved to be highly repeatable. A range of examples is presented which covers a range of application areas, including accelerometer beam structures, microswitches and printer head structures. The basic instrumental concepts are explained together with the modifications required for testing small structures in a localised way.

Keywords

MEMSmechanical propertiesindentationscratchaccelerometermicroswitchprinter head
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 741: Symposium J – Nano- and Microelectromechanical Systems (NEMS and MEMS) and Molecular Machines , 2002 , J2.3
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Oliver, W. C. and Pharr, G. M., “An improved technique for determining hardness and elastic modulus using load and displacement sensing indentation experiments”, J. Mater. Res. 7, pp. 1564–1583, 1992 Google Scholar
2. Bell, T. J., Field, J. S. and Swain, M. V., “Stress-Strain behaviour of thin films using a spherical tipped indenter”, Mat. Res. Soc. Symp. Proc. 239, pp. 331–336, 1992 Google Scholar
3. Doerner, M. F. and Nix, W. D., “A method for interpreting the data from depth-sensing indentation instruments”, J. Mater. Res. 1, pp. 601–609, 1986 Google Scholar
4. Randall, N. X., Hollander, E. and Julia-Schmutz, C., “Characterisation if IC aluminium bonding pads by nanoindentation and scanning force microscopy”, Surf. Coat. Tech. 99, pp. 111–117, 1998 Google Scholar
5. Steinmann, P. A. and Hintermann, H. E., “A review of the mechanical tests for assessment of thin-film adhesion”, J. Vac. Sci. Technol. A 7, pp. 2267–2272, 1989 Google Scholar
6. Burnett, P. J. and Rickerby, D. S., “The scratch adhesion test: an elastic-plastic indentation analysis”, Thin Solid Films 157, pp. 233–254, 1988 Google Scholar
7. Bennett, S. and Matthews, A., “Multi-function scratch tester”, Surf. Coat. Tech. 74–75, pp. 869–876, 1995 Google Scholar
8. Consiglio, R., Randall, N. X., Bellaton, B. and Von Stebut, J., “The nano-scratch tester (NST) as a new tool for assessing the strength of ultrathin hard coatings and the mar resistance of polymer films”, Thin Solid Films 332, pp. 151–156, 1998 Google Scholar
9. Koinkar, V. N. and Bhushan, B., “Micro/nanoscale studies of boundary layers of liquid lubricants for magnetic disks”, J. Appl. Phys. 79, pp. 8071–8075, 1996 Google Scholar
10. Holbery, J. D., Eden, V. L., Sarikaya, M. and Fisher, R. M., “Experimental determination of scanning probe microscope cantilever spring constants utilizing a nanoindentation apparatus”, Rev. Sci. Instr. 71, pp. 3769–3776, 2000 Google Scholar
11. Gueissaz, F. and Piguet, D., “The microreed, an ultra-small passive MEMS magnetic proximity sensor designed for portable applications”, Proceedings of the 14th IEEE International Conference on Micro Electro Mechanical Systems, Interlaken, Switzerland, 21–25 January 2001 Google Scholar
12. Fullin, E., Gobet, J., Tilmans, H. and Bergqvist, J., “A new basic technology for magnetic micro-actuators”, Proceedings of the MEMS98 workshop, Heidelberg, Switzerland, 25–29 January 1998 Google Scholar
13. Tilmans, H., Fullin, E., Ziad, H., Van de Peer, M., Kesters, J. and Van Geffen, E., “A fully-packaged electromagnetic microrelay”, Proceedings of the MEMS99 conference, Orlando, Florida, USA, 17–21 January 1999 Google Scholar
14. Cardot, F. et al, “Fabrication of a magnetic transducer composed of a high-density array of microelectromagnets with on-chip electronics”, Sensors & Actuators A43, pp. 11–16, 1994 Google Scholar